公开(公告)号：US20240356527A1

公开(公告)日：2024-10-24

申请号：US18639890

申请日：2024-04-18

Applicant: Northeastern University

Inventor： Luca COLOMBO ,  Gabriel Giribaldi ,  Jack Guida ,  Siddhartha Ghosh ,  Cristian Cassella ,  Matteo Rinaldi

IPC: H03H9/25 ,  H03H9/02

CPC classification number: H03H9/25 ,  H03H9/02779

Abstract: The present technology provides solidly-mounted, bi-dimensional mode acoustic resonators for use in high frequency electronic applications. The resonator devices are designed to constrain acoustic energy in the piezoelectric layer and electrodes. By concentration of the acoustic waves on the surface and reducing substrate leakage, the quality factor of the system is maintained, even at high frequencies where other resonators fail. The resonance frequency of the devices can be tuned in the 1-27 GHz range. Fabrication of the devices is simplified and cost reduced compared to similar technologies, because the piezoelectric layer is solidly supported and does not have to be released from the substrate.