公开(公告)号：US20220170926A1

公开(公告)日：2022-06-02

申请号：US17677298

申请日：2022-02-22

Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION

Inventor： Nikhil Bhalla ,  Amy Shen Fried ,  Kang-Yu Chu

IPC: G01N33/543 ,  C03C17/09 ,  G01N21/552

Abstract: A method for making a plasmonic mushroom array includes: forming a plurality of metal nano-islands each having nanometer-range dimensions on a surface of a glass substrate; and subjecting to the glass substrate having the plurality of metal nano-islands formed thereon to reactive ion etching such that the plurality of metal nano-islands are converted to a plurality of mushroom-shaped structures each having a metal cap supported by a pillar made of a material of the glass substrate and each having dimensions smaller than the dimensions of the nano-islands, the plurality of mushroom-shaped structures being arranged in a substantially regular pattern with intervals smaller than average intervals between the nano-islands, thereby forming the plurality of nano-scale mushroom-shaped structures on the glass substrate that can exhibit localized surface plasmon resonance.

公开(公告)号：US11867597B2

公开(公告)日：2024-01-09

申请号：US17677298

申请日：2022-02-22

Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION

Inventor： Nikhil Bhalla ,  Amy Shen Fried ,  Kang-Yu Chu

IPC: G01N21/75 ,  G01N33/543 ,  C03C17/09 ,  G01N21/552 ,  G01N21/41

CPC classification number: G01N33/54373 ,  C03C17/09 ,  G01N21/554 ,  C03C2217/255 ,  C03C2218/151 ,  C03C2218/33 ,  G01N21/41

Abstract: A method for making a plasmonic mushroom array includes: forming a plurality of metal nano-islands each having nanometer-range dimensions on a surface of a glass substrate; and subjecting to the glass substrate having the plurality of metal nano-islands formed thereon to reactive ion etching such that the plurality of metal nano-islands are converted to a plurality of mushroom-shaped structures each having a metal cap supported by a pillar made of a material of the glass substrate and each having dimensions smaller than the dimensions of the nano-islands, the plurality of mushroom-shaped structures being arranged in a substantially regular pattern with intervals smaller than average intervals between the nano-islands, thereby forming the plurality of nano-scale mushroom-shaped structures on the glass substrate that can exhibit localized surface plasmon resonance.

公开(公告)号：US11293920B2

公开(公告)日：2022-04-05

申请号：US16606037

申请日：2018-04-18

Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION

Inventor： Nikhil Bhalla ,  Amy Shen Fried ,  Kang-Yu Chu

IPC: G01N21/75 ,  G01N33/543 ,  C03C17/09 ,  G01N21/552 ,  G01N21/41

Abstract: A method for making a plasmonic mushroom array includes: forming a plurality of metal nano-islands each having nanometer-range dimensions on a surface of a glass substrate; and subjecting to the glass substrate having the plurality of metal nano-islands formed thereon to reactive ion etching such that the plurality of metal nano-islands are converted to a plurality of mushroom-shaped structures each having a metal cap supported by a pillar made of a material of the glass substrate and each having dimensions smaller than the dimensions of the nano-islands, the plurality of mushroom-shaped structures being arranged in a substantially regular pattern with intervals smaller than average intervals between the nano-islands, thereby forming the plurality of nano-scale mushroom-shaped structures on the glass substrate that can exhibit localized surface plasmon resonance.

公开(公告)号：US20210140954A1

公开(公告)日：2021-05-13

申请号：US16606037

申请日：2018-04-18

Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION

Inventor： Nikhil Bhalla ,  Amy Shen Fried ,  Kang-Yu Chu

IPC: G01N33/543 ,  G01N21/552 ,  C03C17/09

Abstract: A method for making a plasmonic mushroom array includes: forming a plurality of metal nano-islands each having nanometer-range dimensions on a surface of a glass substrate; and subjecting to the glass substrate having the plurality of metal nano-islands formed thereon to reactive ion etching such that the plurality of metal nano-islands are converted to a plurality of mushroom-shaped structures each having a metal cap supported by a pillar made of a material of the glass substrate and each having dimensions smaller than the dimensions of the nano-islands, the plurality of mushroom-shaped structures being arranged in a substantially regular pattern with intervals smaller than average intervals between the nano-islands, thereby forming the plurality of nano-scale mushroom-shaped structures on the glass substrate that can exhibit localized surface plasmon resonance.