INTERFERENCE FRINGE PROJECTION APPARATUS AND MEASUREMENT APPARATUS

    公开(公告)号:US20180073864A1

    公开(公告)日:2018-03-15

    申请号:US15813955

    申请日:2017-11-15

    Inventor: Daichi WATANABE

    CPC classification number: G01B11/2441 G01B9/02001 G01B11/25

    Abstract: An interference fringe projection apparatus includes light source units that selectively emit light from a coherent light source from one of a plurality of optical emitters, a polarization-maintaining waveguide unit with a plurality of PANDA fibers (polarization-maintaining waveguides) that each guide light emitted from one of the plurality of optical emitters, polarization splitters that split an optical path of light emitted from each of the PANDA fibers by polarization direction, and a polarizing film that transmits only a linear polarization component in a particular direction of light split by the polarization splitter. The light source unit only emits linearly polarized light in one polarization-maintaining direction for at least one of the PANDA fibers, and the polarization-maintaining waveguide unit causes retardation of light emitted from the PANDA fibers to vary.

    ILLUMINATION APPARATUS AND MEASUREMENT APPARATUS

    公开(公告)号:US20180073863A1

    公开(公告)日:2018-03-15

    申请号:US15813815

    申请日:2017-11-15

    Inventor: Daichi WATANABE

    Abstract: An illumination apparatus includes a light source including a semiconductor laser that emits coherent light, a polarization splitter including rutile, a half-phase retardation film, and another rutile to split optical paths by the polarization direction of incident light, and a projection polarization switching mechanism including a half-wave plate unit, a quarter-wave plate unit, and a polarizing film to switch projected light emitted from the polarization splitter between polarization components of light transmitted over optical paths split by the polarization splitter and a polarization component of light transmitted over any one optical path. As a result, a compact illumination apparatus, and a measurement apparatus using the same, with a common light source and optical system for both observation light and measurement light can be provided.

    ILLUMINATION APPARATUS
    8.
    发明申请

    公开(公告)号:US20190339055A1

    公开(公告)日:2019-11-07

    申请号:US16517721

    申请日:2019-07-22

    Abstract: An illumination apparatus generates an interference fringe. An input arm receives an input light beam from a light source. A splitter splits the input light beam that has passed through the input arm into a first output arm and a second output arm. A phase modulator changes a phase difference between the output light beams of the first output arm and the second output arm. A phase detector detects the phase difference between output light beams respectively output from the first output arm and the second output arm based on a return light beam generated by combining a first reflected light beam and a second reflected light beam respectively reflected by ends of the first output arm and the second output arm.

    THREE-DIMENSIONAL FORM MEASUREMENT DEVICE
    9.
    发明申请

    公开(公告)号:US20190049237A1

    公开(公告)日:2019-02-14

    申请号:US16165948

    申请日:2018-10-19

    Inventor: Daichi WATANABE

    Abstract: A three-dimensional form measurement device includes: an interference fringe projector that scans an interference fringe and projects one of a plurality of interference fringe patterns; an imaging device that images the subject of measurement onto which the interference fringe is projected and generates a plurality of interference fringe images corresponding to at least three different interference fringe patterns in each of a plurality of imaging conditions; and a controller that selects, for each pixel, which imaging condition should be used to compute a phase distribution image of the subject of measurement, and computes a phase of each pixel in the phase distribution image based on the pixel values in the plurality of interference fringe images corresponding to the imaging condition selected for each pixel.

    IMAGE DISPLAY DEVICE
    10.
    发明申请

    公开(公告)号:US20170111635A1

    公开(公告)日:2017-04-20

    申请号:US15391771

    申请日:2016-12-27

    Abstract: Provided is an image display device, including: a light flux emitter (10) which emits a plurality of parallel light fluxes; and a controller (20) which periodically subjects, to two-dimensional deflection, the parallel light fluxes emitted from the light flux emitter (10), based on a scan signal, and controls, synchronously with the scan signal, light intensity of the plurality of parallel light fluxes based on a light intensity control signal based on image information input thereto, in which: the light flux emitter (10) has at least a plurality of photonic crystal semiconductor lasers (11a) which emit the plurality of parallel light fluxes and are two-dimensionally arranged; and the parallel light fluxes emitted from the plurality of photonic crystal semiconductor lasers (11a) are controlled in light intensity, based on the light intensity control signal.

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