公开(公告)号：US20180045594A1

公开(公告)日：2018-02-15

申请号：US15236651

申请日：2016-08-15

Applicant: OptoFidelity Oy

Inventor： Petri MANTERE ,  Pertti KAUPPINEN

IPC: G01L25/00 ,  G01L1/04

CPC classification number: G01L25/00 ,  G01L1/04 ,  G01L5/0038

Abstract: There is disclosed a method for calibrating a measurement device, in which a probe is coupled with a base part by a flexure. The method includes setting a position of a probe of the measurement device by moving the base part so that a tip of the probe does not touch an object; obtaining information of a location of the probe representing a free weight of the probe; and moving the base part so that the tip of the probe moves towards a surface of the object and obtaining information of the location of the probe until the information indicates that the location of the tip of the probe has changed. There is also disclosed a measurement device including a base part; a probe having a tip; a flexure coupling the base part with the probe; means for moving the base part; and means for obtaining information of a location of the probe without contacting the flexure and/or the probe.