公开(公告)号：US11977211B2

公开(公告)日：2024-05-07

申请号：US17441279

申请日：2020-07-09

Applicant: Orbotech Ltd.

Inventor： David Fisch ,  Avraham Adler ,  Ilia Lutsker ,  Yigal Katzir ,  Avinoam Rosenberg

IPC: G02B19/00 ,  G02B3/08 ,  G02B21/36 ,  G02B26/08 ,  G02F1/29

CPC classification number: G02B19/0066 ,  G02B3/08 ,  G02B21/361 ,  G02B26/0833 ,  G02F1/29

Abstract: Provided is an optical apparatus that includes an illumination assembly which include an extended radiation source emitting radiation with a controllable spatial distribution and telecentric condensing optics, configured to receive and project the emitted radiation with a numerical aperture exceeding 0.3 along a first optical axis onto a field and an imaging assembly that includes a sensor and objective optics configured to image the field along a second optical axis onto the sensor and also a prism combiner positioned between the field and the condensing and objective optics which is configured to combine the first and second optical axes, while reflecting at least one of the optical axes multiple times within the prism combiner.

公开(公告)号：US20220155574A1

公开(公告)日：2022-05-19

申请号：US17441279

申请日：2020-07-09

Applicant: Orbotech Ltd.

Inventor： David Fisch ,  Avraham Adler ,  Ilia Lutsker ,  Yigal Katzir ,  Avinoam Rosenberg

IPC: G02B19/00 ,  G02F1/29 ,  G02B3/08 ,  G02B21/36 ,  G02B26/08

Abstract: Provided is an optical apparatus that includes an illumination assembly which include an extended radiation source emitting radiation with a controllable spatial distribution and telecentric condensing optics, configured to receive and project the emitted radiation with a numerical aperture exceeding 0.3 along a first optical axis onto a field and an imaging assembly that includes a sensor and objective optics configured to image the field along a second optical axis onto the sensor and also a prism combiner positioned between the field and the condensing and objective optics which is configured to combine the first and second optical axes, while reflecting at least one of the optical axes multiple times within the prism combiner.

公开(公告)号：US20240241358A1

公开(公告)日：2024-07-18

申请号：US18622193

申请日：2024-03-29

Applicant: Orbotech Ltd.

Inventor： David Fisch ,  Avraham Adler ,  Ilia Lutsker ,  Yigal Katzir ,  Avinoam Rosenberg

IPC: G02B19/00 ,  G02B3/08 ,  G02B21/36 ,  G02B26/08 ,  G02F1/29

CPC classification number: G02B19/0066 ,  G02B3/08 ,  G02B21/361 ,  G02B26/0833 ,  G02F1/29

Abstract: Provided is an optical apparatus that includes an illumination assembly which include an extended radiation source emitting radiation with a controllable spatial distribution and telecentric condensing optics, configured to receive and project the emitted radiation with a numerical aperture exceeding 0.3 along a first optical axis onto a field and an imaging assembly that includes a sensor and objective optics configured to image the field along a second optical axis onto the sensor and also a prism combiner positioned between the field and the condensing and objective optics which is configured to combine the first and second optical axes, while reflecting at least one of the optical axes multiple times within the prism combiner.