公开(公告)号：US20230153977A1

公开(公告)日：2023-05-18

申请号：US17955212

申请日：2022-09-28

Applicant: Orbotech Ltd.

Inventor： Nai-Wei Chen ,  Yueh-Nan Chen ,  Chih-Chang Lai ,  Gwan Sub Lee ,  Jongho Lee

IPC: G06T7/00 ,  G09G3/34 ,  G09G3/00 ,  G09G3/36 ,  G06T7/73

CPC classification number: G06T7/0004 ,  G06T7/73 ,  G09G3/007 ,  G09G3/3406 ,  G09G3/3648 ,  G06T2207/30121 ,  G09G2300/043 ,  G09G2320/0693 ,  G09G2330/10 ,  G09G2330/12

Abstract: An array checker (AC) is described. The array checker may include software configured to implement a method. By implementing the method, the array checker may detect a location of a defect and then compensate for a shift in the defect. In particular, the method may include generating one or more reference lines in a panel. The reference lines may include a location which is known prior to generating an image of the panel. The array checker may then capture an image of the panel. The image may be captured by voltage imaging. The image may include the defect and the one or more reference lines. The method may then include calculating an offset of the reference line from the known location. The offset may then be applied to the defect location for compensating the shift in the defect.