HIGH-QUALITY WIDE-SPECTRUM DATA BY GENERATIVE AI

    公开(公告)号:US20250037261A1

    公开(公告)日:2025-01-30

    申请号:US18776530

    申请日:2024-07-18

    Applicant: Orbotech Ltd.

    Inventor: Hagit Schechter

    Abstract: A system includes a light source configured to generate a beam of light, a stage configured to hold a workpiece in the path of the beam of light, a detector configured to capture an image of the workpiece based on the beam of light reflected from the workpiece, and a processor in electronic communication with the detector. The processor is configured to inspect the image of the workpiece received from the detector using an artificial intelligence (AI) inference model that is trained using a combined dataset of manually tagged data and AI-tagged data, and the AI inference model is stored on an electronic data storage unit that is in electronic communication with the processor.

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