公开(公告)号：US20240375222A1

公开(公告)日：2024-11-14

申请号：US18315998

申请日：2023-05-11

Applicant: Orbotech Ltd.

Inventor： Roman Vander ,  Boris Kling ,  Alexey Shkolnik ,  Idan Amsalem

IPC: B23K26/382 ,  B23K26/073 ,  G02B27/09 ,  G02F1/11

Abstract: A micromachining system includes a laser generator, an acousto-optical deflector (AOD), and at least one signal generator. The laser generator is configured to generate a laser beam, and the at least one AOD is positioned in a path of the laser beam. The at least one acoustic signal generator is configured to generate at least two acoustic signals, including a first acoustic signal having a periodic waveform and a second acoustic signal having a freeform waveform. The at least one acoustic signal generator is further configured to apply the first acoustic signal to the AOD to output a deflected laser beam having a Gaussian profile, and apply the second acoustic signal to the AOD to adjust the Gaussian profile of the deflected laser beam to a modified profile.