公开(公告)号：US12204228B2

公开(公告)日：2025-01-21

申请号：US17423471

申请日：2020-02-27

Applicant: Orbotech Ltd.

Inventor： Zvi Kotler ,  Yuval Berg

IPC: G02F1/33 ,  B23K26/06 ,  B23K26/064 ,  B23K26/073 ,  G02B27/09

Abstract: Optical apparatus (20) includes a laser (22), which is configured to emit a beam of coherent optical radiation at a specified wavelength along a beam axis. A deflector (24) is configured to intercept and selectably deflect the beam over a range of angles relative to the beam axis. A plurality of diffractive optical elements (DOEs—32, 34, 36, 64, 66, 68) are positioned to receive the deflected beam at different, respective deflection angles within the range and to output respective diffracted beams. Beam-combining optics (42, 74) are configured to receive and deflect the diffracted beams from the DOEs so that all of the diffracted beams are directed along a common output axis toward a target (48).

公开(公告)号：US20220121082A1

公开(公告)日：2022-04-21

申请号：US17423471

申请日：2020-02-27

Applicant: Orbotech Ltd.

Inventor： Zvi Kotler ,  Yuval Berg

IPC: G02F1/33 ,  G02B27/09 ,  B23K26/064 ,  B23K26/06 ,  B23K26/073

Abstract: Optical apparatus (20) includes a laser (22), which is configured to emit a beam of coherent optical radiation at a specified wavelength along a beam axis. A deflector (24) is configured to intercept and selectably deflect the beam over a range of angles relative to the beam axis. A plurality of diffractive optical elements (DOEs—32, 34, 36, 64, 66, 68) are positioned to receive the deflected beam at different, respective deflection angles within the range and to output respective diffracted beams. Beam-combining optics (42, 74) are configured to receive and deflect the diffracted beams from the DOEs so that all of the diffracted beams are directed along a common output axis toward a target (48).