公开(公告)号：US09632105B2

公开(公告)日：2017-04-25

申请号：US14347867

申请日：2012-09-28

Applicant: Panasonic Corporation

Inventor： Shigehiro Yoshiuchi ,  Satoshi Ohuchi ,  Tsuyoshi Fujii ,  Kensaku Yamamoto ,  Hideo Ohkoshi

IPC: G01P15/08 ,  G01C19/5769 ,  B81B7/00 ,  H01L23/00

CPC classification number: G01C19/5769 ,  B81B7/0048 ,  B81B2201/0242 ,  B81B2201/025 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2207/07 ,  G01P15/0802 ,  H01L24/32 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

Abstract: An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (1), that is, an inertial force sensor includes ceramic substrate (6), lower lid (4) adhering to ceramic substrate (6) with adhesives (11a and 11b) (first adhesives), and sensor element (2) adhering to lower lid (4) with adhesives (10a and 10b) (second adhesives). The elastic moduli of adhesives (11a and 11b) are smaller than those of adhesives (10a and 10b).

公开(公告)号：US20140238131A1

公开(公告)日：2014-08-28

申请号：US14347867

申请日：2012-09-28

Applicant: PANASONIC CORPORATION

Inventor： Shigehiro Yoshiuchi ,  Satoshi Ohuchi ,  Tsuyoshi Fujii ,  Kensaku Yamamoto ,  Hideo Ohkoshi

IPC: G01P15/08

CPC classification number: G01C19/5769 ,  B81B7/0048 ,  B81B2201/0242 ,  B81B2201/025 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2207/07 ,  G01P15/0802 ,  H01L24/32 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

Abstract: An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (1), that is, an inertial force sensor includes ceramic substrate (6), lower lid (4) adhering to ceramic substrate (6) with adhesives (11a and 11b) (first adhesives), and sensor element (2) adhering to lower lid (4) with adhesives (10a and 10b) (second adhesives). The elastic moduli of adhesives (11a and 11b) are smaller than those of adhesives (10a and 10b).

Abstract translation: 即使向惯性力传感器施加外部应力也能够抑制检测灵敏度的波动的惯性力传感器。 角速度传感器（1）即惯性力传感器包括陶瓷基板（6），粘合剂（11a和11b）（第一粘合剂）和传感器元件（2）附着在陶瓷基板（6）上的下盖 ）用粘合剂（10a和10b）（第二粘合剂）粘附到下盖（4）上。 粘合剂（11a和11b）的弹性模量小于粘合剂（10a和10b）的弹性模量。