Ion source
    2.
    发明授权
    Ion source 失效
    离子源

    公开(公告)号:US3619684A

    公开(公告)日:1971-11-09

    申请号:US3619684D

    申请日:1970-04-23

    Applicant: PHILIPS CORP

    CPC classification number: H01J49/14

    Abstract: A nonmagnetic, electron impact ion source comprising an evacuated envelope having means for passing ionizing gases through the envelope. Within the envelope, an electron emitting cathode is positioned adjacent a grid-shaped ionization chamber. A conducting wall section of the ionization chamber that is impenetrable to ions has an ion exiting aperture, which is adjacent to a grid-shaped electrode for extracting ions. The extracting electrode is positioned at a distance of a few tenths of a mm. from the ion exiting aperture, and kept at a small negative voltage not exceeding 5 volts relative to the ionization chamber. An acceleration electrode adjacent to the extracting electrode forms ions from the ionization chamber into beams. A screen grid placed between the extracting and acceleration electrodes prevents the high negative voltage of the acceleration electrode from affecting the electric field within the ionization chamber.

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