公开(公告)号：US11335222B2

公开(公告)日：2022-05-17

申请号：US16609653

申请日：2018-06-18

Applicant: PHOTON DYNAMICS, INC.

Inventor： Raul Albert Martin ,  Richard Norio Blythe

IPC: G09G3/00 ,  G01R31/58 ,  G01R31/308

Abstract: A system for inspection of electrical circuits, which electrical circuits include a multiplicity of conductors which are mutually spaced from each other, the system including a voltage driver operative to apply different electrical voltages to a plurality of conductors from among the multiplicity of conductors, which plurality of conductors are in spatial propinquity to each other, a sensor operative to sense at least one characteristic of a test region defined thereby with respect to the electrical circuits, the sensor lacking sufficient spatial resolution to distinguish between the locations of individual ones of the plurality of conductors and a defect indicator responsive to at least one output of the sensor for ascertaining whether a defect exists in the plurality of conductors.