公开(公告)号：US20020186814A1

公开(公告)日：2002-12-12

申请号：US09876469

申请日：2001-06-07

Applicant: Plex LLC

Inventor： Malcolm W. McGeoch

IPC: H01J035/00

CPC classification number: H05G2/003 ,  G03F7/70033

Abstract: A source of photons includes a discharge chamber, first and second groups of ion beam sources in the discharge chamber and a neutralizing mechanism. Each of the ion beam sources electrostatically accelerates a beam of ions of a working gas toward a plasma discharge region. The first group of ion beam sources acts as a cathode and the second group of ion beam sources acts as an anode for delivering a heating current to the plasma discharge region. The neutralizing mechanism at least partially neutralizes the ion beams before they enter the plasma discharge region. The neutralized beams and the heating current form a hot plasma that radiates photons. The photons may be in the soft x-ray or extreme ultraviolet wavelength range and, in one embodiment, have wavelengths in a range of about 10-15 nanometers.

Abstract translation: 光子源包括放电室，放电室中的第一和第二组离子束源以及中和机构。 每个离子束源将等离子体放电区域的工作气体的离子束静电加速。 第一组离子束源用作阴极，第二组离子束源用作将电流传递到等离子体放电区域的阳极。 中和机构在进入等离子体放电区域之前至少部分地中和离子束。 中和的光束和加热电流形成辐射光子的热等离子体。 光子可以在软X射线或极紫外波长范围内，并且在一个实施例中，波长在约10-15纳米的范围内。

公开(公告)号：US20020186815A1

公开(公告)日：2002-12-12

申请号：US10165998

申请日：2002-06-10

Applicant: PLEX LLC

Inventor： Malcolm W. McGeoch

IPC: H01J035/00

CPC classification number: H05G2/003 ,  G03F7/70033

Abstract: A source of photons or neutrons includes a housing that defines a discharge chamber, a first group of ion beam sources directed toward a plasma discharge region in the discharge chamber, the first group of ion beam sources including a first electrode and an inner shell, and a second electrode spaced from the plasma discharge region. The source of photons or neutrons further includes a first power supply for energizing the first group of ion beam sources to electrostatically accelerate toward the plasma discharge region ion beams which are at least partially neutralized before they enter the plasma discharge region, and a second power supply coupled between the first and second electrodes for delivering a heating current to the plasma discharge region. The ion beams and the heating current form a hot plasma that radiates photons or neutrons. The source of photons or neutrons may further include a second group of ion beam sources. The photons may be in the soft X-ray or extreme ultraviolet wavelength range and, in one embodiment, have wavelengths in a range of about 10-15 nanometers.

Abstract translation: 光子或中子源包括限定放电室的壳体，指向放电室中的等离子体放电区域的第一组离子束源，第一组离子束源包括第一电极和内壳，以及 与等离子体放电区间隔开的第二电极。 光子或中子的源还包括用于激励第一组离子束源的静电加速的等离子体放电区离子束的第一电源，所述离子束在它们进入等离子体放电区域之前至少部分被中和，第二电源 耦合在第一和第二电极之间，用于将加热电流传送到等离子体放电区域。 离子束和加热电流形成辐射光子或中子的热等离子体。 光子或中子的源可以进一步包括第二组离子束源。 光子可以在软X射线或极紫外波长范围内，并且在一个实施例中，波长具有在约10-15纳米的范围内。