公开(公告)号：US11474128B2

公开(公告)日：2022-10-18

申请号：US16747557

申请日：2020-01-21

Applicant: PRINCO CORP.

Inventor： Yi-Lin Chu ,  Hung-sheng Ku

IPC: G01R1/067 ,  G01R31/28 ,  G03F7/42

Abstract: A metal probe structure and a method for fabricating the same are provided. The metal probe structure includes a multi-layer substrate, a first flexible dielectric layer, a second flexible dielectric layer, and a plurality of first metal components. The first flexible dielectric layer is disposed over the multi-layer substrate and has a conductive layer formed thereover. The second flexible dielectric layer is disposed over the first flexible dielectric layer to cover the conductive layer. The plurality of first metal components is disposed over the conductive layer and partially in the second flexible dielectric layer to serve as a metal probe.