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公开(公告)号:US20170160087A1
公开(公告)日:2017-06-08
申请号:US15300005
申请日:2015-06-03
Inventor: TAKAMI ISHIDA
IPC: G01C19/5607 , H01L41/187 , H01L41/332 , H01L41/113
CPC classification number: G01C19/5607 , G01C19/5628 , H01L41/0477 , H01L41/0825 , H01L41/113 , H01L41/1876 , H01L41/332
Abstract: An angular velocity sensor includes a substrate, a lower electrode on the substrate, a piezoelectric body on the lower electrode, and an upper electrode on the piezoelectric body. The piezoelectric body includes a first portion and a second portion above the first portion. The first portion has a side surface connected to a lower surface of the piezoelectric body. The second portion has a side surface connected to an upper surface of the piezoelectric body. A supplementary angle of an angle formed between the upper surface and the side surface of the second portion of the piezoelectric body is smaller than an angle formed between the lower surface and the side surface of the first portion of the piezoelectric body. This angular velocity sensor can effectively prevent stress from concentrating to the piezoelectric body.
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公开(公告)号:US20170089941A1
公开(公告)日:2017-03-30
申请号:US15128096
申请日:2015-04-07
Inventor: TAKASHI IMANAKA , TAKANORI AOYAGI , TAKAMI ISHIDA , HIROYUKI AIZAWA
CPC classification number: G01P15/08 , B81B2201/0235 , B81B2203/0181 , B81B2203/053 , B81B2207/095 , B81B2207/096 , B81C1/00301 , G01P15/0802 , G01P15/123 , G01P15/125 , G01P15/18 , G01P2015/0831 , G01P2015/0837 , G01P2015/0871
Abstract: A sensor includes an upper lid layer, a lower lid layer, and a sensor layer disposed between the upper lid layer and the lower lid layer. One of the upper lid layer and the lower lid layer includes an insulative region mainly made of glass, a via-electrode covered with the insulative region, and an outer circumferential region mainly made of silicon and provided at an outer circumference of the insulative region. This sensor allows reducing outer dimensions of a wafer, which is a material for the sensor.
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公开(公告)号:US20220252869A1
公开(公告)日:2022-08-11
申请号:US17660843
申请日:2022-04-27
Inventor: TAKAMI ISHIDA , KAZUKI KOMAKI , RYOUICHI TAKAYAMA
Abstract: A light control system includes an optical reflection element and a controller. The optical reflection element includes: a reflector; and a first swing portion and a second swing portion disposed at respective one of positions sandwiching the reflector. Each of the first swing portion and the second swing portion includes: a first connection portion coupled to the reflector; a first vibration portion; a second vibration portion; a first drive portion; a second drive portion; and a second connection portion that connects the first and second vibration portions to a base. The controller causes the first and second drive portions of the first swing portion to vibrate in the same phase, and causes the first and second drive portions of the second swing portion to vibrate in the same phase but in the opposite phase to the first swing portion.
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公开(公告)号:US20200241286A1
公开(公告)日:2020-07-30
申请号:US16648264
申请日:2018-10-25
Inventor: TAKAMI ISHIDA , KAZUKI KOMAKI
Abstract: A reflective optical element includes a reflector configured to reflect light, a first connection part connected with the reflector, first and second transmission parts connected with of the first connection part, first and second vibrator parts connected with respective base ends of the first and second transmission parts, first and second driver parts connected with respective head ends of the first and second vibrator parts, a base, and a second connection part connecting the first and second vibrator parts vibratably with the base.
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公开(公告)号:US20170274664A1
公开(公告)日:2017-09-28
申请号:US15427085
申请日:2017-02-08
Inventor: YUTAKA UETA , YOUSUKE TOYOFUKU , TAKAMI ISHIDA , HIDEAKI HORIO
IPC: B41J2/175
CPC classification number: B41J2/17563 , B41J2/14233 , B41J2002/14266 , B41J2002/14403 , B41J2002/14419 , B41J2202/11
Abstract: An ink jet head includes an actuator and a structure body. The actuator includes a thin film portion, a pressure chamber layer, and a filter. The thin film portion is deformed by application of a voltage to apply a pressure to an ink. The pressure chamber layer is formed on a surface of the pressure chamber and has a recessed portion. The filter is integrally formed with the pressure chamber layer so as to be disposed in the recessed portion, the filter having an aperture smaller than a diameter of a nozzle. The actuator is stacked on an upper surface of the structure body and joined to the upper surface thereof. A pressure chamber is formed by the recessed portion and the upper surface of the structure body, and the filter is disposed in the pressure chamber.
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