公开(公告)号：US20240369763A1

公开(公告)日：2024-11-07

申请号：US18228623

申请日：2023-07-31

Applicant: Purdue Research Foundation

Inventor： Tzu-Han Chang ,  Chen-Lung Hung

IPC: G02B6/122 ,  G02B6/13

Abstract: A method of forming an optical waveguide from a multi-layer material is described. The multi-layer material includes a resist material layer deposited over a waveguide material layer, and the waveguide material layer deposited over a first cladding material layer. The method includes using a lithography procedure to form a three-dimensional tapered indentation into a top surface of the resist material layer, transferring the three-dimensional tapered indentation from the resist material layer to the waveguide material layer, forming a three-dimensional tapered optical waveguide by removing a portion of the waveguide material layer adjacent to the three-dimensional tapered indentation, and depositing a second cladding material layer over the optical waveguide to form an optical coupler having an optical input facet.