公开(公告)号：US11154792B2

公开(公告)日：2021-10-26

申请号：US15751044

申请日：2016-08-10

Applicant: RASIRC, INC.

Inventor： Jeffrey Spiegelman ,  Douglas Shepherd ,  Russell J. Holmes ,  Zohreh Shamsi

IPC: B01B1/00 ,  C23C16/448 ,  A61L2/20 ,  A61L2/26 ,  F22B3/02 ,  H05B1/02 ,  G03F1/82 ,  G03F7/42 ,  H01L21/02

Abstract: Methods for the gas-phase delivery of gases, such as process gases, from the gas phase of a multicomponent source liquid are provided. The methods are generally directed to the generation of process gases having mass flow rates which are proportional to the input power delivered to the multicomponent source liquid containers. The methods may be used to deliver process gases to critical process applications.

公开(公告)号：US20180229149A1

公开(公告)日：2018-08-16

申请号：US15751044

申请日：2016-08-10

Applicant: RASIRC, INC.

Inventor： Jeffrey Spiegelman ,  Douglas Shepherd ,  Russell J. Holmes ,  Zohreh Shamsi

IPC: B01B1/00 ,  C23C16/448 ,  F22B3/02 ,  H05B1/02 ,  A61L2/26 ,  A61L2/20

CPC classification number: B01B1/005 ,  A61L2/20 ,  A61L2/208 ,  A61L2/26 ,  A61L2202/14 ,  C23C16/4481 ,  C23C16/4485 ,  F22B3/02 ,  G03F1/82 ,  G03F7/423 ,  H01L21/02057 ,  H01L21/02271 ,  H05B1/0297

Abstract: Methods for the gas-phase delivery of gases, such as process gases, from the gas phase of a multicomponent source liquid are provided. The methods are generally directed to the generation of process gases having mass flow rates which are proportional to the input power delivered to the multicomponent source liquid containers. The methods may be used to deliver process gases to critical process applications.