公开(公告)号：US3585349A

公开(公告)日：1971-06-15

申请号：US3585349D

申请日：1963-04-15

Applicant: ROHR CORP

Inventor： KALBFELL DAVID C

IPC: H01J29/94 ,  H01J37/30 ,  H01J37/301 ,  B23K9/00

CPC classification number: H01J29/94 ,  H01J37/3005 ,  H01J37/301

Abstract: The invention relates to apparatus for bringing an electron beam outside the high vacuum chamber of its electron gun to direct the same onto a workpiece. The apparatus comprises beam aligning means, a visual optical system, at least one buffer vacuum chamber, means for surrounding the beam with a shield gas, and pumping mans individual to each chamber for individual pumping of them. The high vacuum chamber and buffer chamber have pyrex windows disposed within the field of view of the optical system. The high vacuum and buffer chambers also have aligned flow limiting orifices drilled in the said windows for passing the beam from the high vacuum chamber to the workpiece, one of the orifices interconnecting the two chambers and the other orifice being the exit orifice adjacent the workpiece.