公开(公告)号：US6041817A

公开(公告)日：2000-03-28

申请号：US138174

申请日：1998-08-21

Applicant: Ronald R. Guertin

Inventor： Ronald R. Guertin

IPC: B01J3/02 ,  B01J3/00 ,  F16K51/02 ,  G05D16/20 ,  G05D16/00

CPC classification number: G05D16/208 ,  F16K51/02 ,  Y10T137/86083 ,  Y10T137/87925

Abstract: An additional isolation valve is incorporated into a vacuum processing system to increase the life of the system's mechanical pump, reduce maintenance costs and downtime, prevent particle back streaming and reduce safety risks to maintenance technicians. The system has a process chamber with at least one port, a foreline valve connected to the port, and a vacuum manifold in fluid communication with the foreline valve. The mechanical pump is connected to the vacuum manifold for evacuating the contents of the process chamber. The isolation valve is connected between the foreline valve and the vacuum manifold and is operated in unison, or primarily in unison, with the foreline valve.

Abstract translation: 一个额外的隔离阀并入真空处理系统，以增加系统机械泵的使用寿命，降低维护成本和停机时间，防止颗粒反流，降低维护技术人员的安全隐患。 该系统具有处理室，其具有至少一个端口，连接到端口的前级管线阀以及与前级管路流体连通的真空歧管。 机械泵连接到真空歧管以排出处理室的内容物。 隔离阀连接在前级阀和真空歧管之间，并与前级阀一致或主要一致地运行。