公开(公告)号：US20140314535A1

公开(公告)日：2014-10-23

申请号：US14253502

申请日：2014-04-15

Applicant: Rudolph Technologies, Inc.

Inventor： Troy Palm ,  Kevin J. Barr ,  Ralph P. Sowden ,  Matthew M. Laberge ,  Andrey Monjoseph ,  Brian Delsey ,  Emily Nordick ,  Richard Sobotka ,  Chetan Suresh

IPC: H01L21/68

CPC classification number: H01L21/68 ,  H01L21/67775

Abstract: A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.

Abstract translation: 公开了一种用于处理胶卷框的装载口。 负载端口是模块化的，并且与模块化设备的适用标准基本兼容。 特别地，负载端口与不适于处理胶片框架的装载端口基本上可互换。 装载端口具有用于移动胶片框架的紧凑型梭子和用于对准不同配置的胶片框架和胶卷盒的柔性对准机构。

公开(公告)号：US09437467B2

公开(公告)日：2016-09-06

申请号：US14253502

申请日：2014-04-15

Applicant: Rudolph Technologies, Inc.

Inventor： Troy Palm ,  Kevin J. Barr ,  Ralph P. Sowden ,  Matthew M. Laberge ,  Andrey Monjoseph ,  Brian Delsey ,  Emily Nordick ,  Richard Sobotka ,  Chetan Suresh

IPC: H01L21/68 ,  H01L21/677

CPC classification number: H01L21/68 ,  H01L21/67775

Abstract: A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.

Abstract translation: 公开了一种用于处理胶卷框的装载口。 负载端口是模块化的，并且与模块化设备的适用标准基本兼容。 特别地，负载端口与不适于处理胶片框架的装载端口基本上可互换。 装载端口具有用于移动胶片框架的紧凑型梭子和用于对准不同配置的胶片框架和胶卷盒的柔性对准机构。