公开(公告)号：US11578967B2

公开(公告)日：2023-02-14

申请号：US16620317

申请日：2018-06-08

Applicant: Rudolph Technologies, Inc.

Inventor： John Schaefer ,  Christopher Voges ,  Nicholas Smith ,  Jeffrey Treptau

IPC: H04N5/225 ,  G01B11/06 ,  G06T7/00 ,  G01B11/25 ,  H04N5/232 ,  H04N5/247 ,  G01N21/95

Abstract: One example of an inspection system includes a laser, a magnification changer, and a first camera. The laser projects a line onto a wafer to be inspected. The magnification changer includes a plurality of selectable lenses of different magnification. The first camera images the line projected onto the wafer and outputs three-dimensional line data indicating the height of features of the wafer. Each lens of the magnification changer provides the same nominal focal plane position of the first camera with respect to the wafer.