公开(公告)号：US10412311B2

公开(公告)日：2019-09-10

申请号：US15209218

申请日：2016-07-13

Applicant: Rudolph Technologies, Inc.

Inventor： Robert Bishop ,  Timothy Pinkney

IPC: H04N7/18 ,  H04N5/235 ,  G01N21/64 ,  G01N21/956 ,  G01N21/95 ,  G01N21/88 ,  H04N5/33 ,  H04N5/372 ,  H04N5/378 ,  G03B13/36

Abstract: A method and apparatus for optimizing inspection high-speed optical inspection of parts using intelligent image analysis to determine optimal focus using high numerical aperture (NA) optics, achieve a superior signal-to-noise ratio, resolution, and inspection speed performance with very limited depth of field lenses.

公开(公告)号：US20160352997A1

公开(公告)日：2016-12-01

申请号：US15209218

申请日：2016-07-13

Applicant: Rudolph Technologies, Inc.

Inventor： Robert Bishop ,  Timothy Pinkney

IPC: H04N5/235 ,  H04N5/372 ,  G01N21/95 ,  G03B13/36 ,  G01N21/64 ,  G01N21/88 ,  H04N5/33 ,  H04N5/378

CPC classification number: H04N5/2356 ,  G01N21/6456 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/6463 ,  G01N2021/95638 ,  G01N2201/0612 ,  G01N2201/062 ,  G01N2201/10 ,  G03B13/36 ,  H04N5/332 ,  H04N5/37206 ,  H04N5/378 ,  H04N7/18

Abstract: A method and apparatus for optimizing inspection high-speed optical inspection of parts using intelligent image analysis to determine optimal focus using high numerical aperture (NA) optics, achieve a superior signal-to-noise ratio, resolution, and inspection speed performance with very limited depth of field lenses.

Abstract translation: 使用智能图像分析优化检测部件的高速光学检测的方法和装置，使用高数值孔径（NA）光学元件确定最佳聚焦，实现了非常有限的信号噪声比，分辨率和检测速度性能 景深镜头。