公开(公告)号：US20180364085A1

公开(公告)日：2018-12-20

申请号：US16061788

申请日：2016-12-08

Applicant: SARAYA CO., LTD.

Inventor： Haijun ZHANG ,  Qinghai ZHAO ,  Jianglong YU ,  Tomomasa ITARASHIKI ,  Daiki ANRAKU

IPC: G01F11/28 ,  B01J4/02 ,  A61L2/20 ,  A61L2/24

CPC classification number: G01F11/28 ,  A61L2/20 ,  A61L2/24 ,  A61L2202/14 ,  A61L2202/15 ,  A61L2202/24 ,  B01J3/02 ,  B01J4/02

Abstract: Provided is a system for supplying a liquid (such as an irritative chemical solution) safely. This liquid supplying system comprises: (a) a means that creates a negative pressure in a treatment chamber by driving a first depressurizing means and depressurizing the treatment chamber; (b) a means that introduces the negative pressure of the treatment chamber to a measurement chamber; (c) a means that maintains the negative pressure introduced to the measurement chamber; (d) a means that sucks a liquid from a container into the measurement chamber by employing the negative pressure of the measurement chamber; and (e) a means that sucks the liquid of the measurement chamber into the treatment chamber by employing a vacuum in the treatment chamber.