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    CALIBRATION STANDARD WITH PRE-DETERMINED FEATURES
    1.
    发明申请
    CALIBRATION STANDARD WITH PRE-DETERMINED FEATURES 审中-公开
    具有预先确定的特征的校准标准

    公开(公告)号：US20160069929A1

    公开(公告)日：2016-03-10

    申请号：US14783403

    申请日：2013-04-17

    Applicant: SEAGATE TECHNOLOGY LLC

    Inventor： Gennady Gauzner ,  Zhaoning Yu ,  Nobuo Kurataka ,  David S. Kuo ,  Kim Y. Lee ,  Yautzong Hsu ,  Hong Ying Wang

    IPC: G01Q40/02 ,  G01N21/01 ,  H01J37/26

    CPC classification number: G01Q40/02 ,  G01N21/01 ,  G01N2201/13 ,  G01Q40/00 ,  G03F7/0002 ,  H01J37/261 ,  H01J37/263 ,  H01J2237/2602 ,  H01J2237/2826

    Abstract: Provided herein in an apparatus, including a substrate; a functional layer, wherein the functional layer has a composition characteristic of a workpiece of an analytical apparatus; and pre-determined features configured to calibrate the analytical apparatus. Also provided herein is an apparatus, including a functional layer overlying a substrate; and pre-determined features for calibration of an analytical apparatus configured to measure the surface of a workpiece, wherein the functional layer has a composition similar to the workpiece. Also provided herein is a method, including providing a lithographic calibration standard having a functional layer to an analytical apparatus, wherein the functional layer has a composition characteristic of a workpiece of the analytical apparatus; providing calibration standard specifications to a computer interfaced with the analytical apparatus; and calibrating the analytical apparatus in accordance with calibration standard readings and the calibration standard specifications.

    Abstract translation: 本文提供的装置包括基板; 功能层，其中所述功能层具有分析装置的工件的成分特征; 以及配置成校准分析装置的预定特征。 本文还提供了一种装置，包括覆盖衬底的功能层; 以及用于校准配置成测量工件表面的分析装置的预定特征，其中所述功能层具有类似于所述工件的组成。 本文还提供了一种方法，包括向分析装置提供具有功能层的光刻校准标准，其中功能层具有分析装置的工件的成分特征; 向与分析仪器连接的计算机提供校准标准规格; 并根据校准标准读数和校准标准规格校准分析仪器。

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