公开(公告)号：US20240328713A1

公开(公告)日：2024-10-03

申请号：US18612598

申请日：2024-03-21

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Yukinobu NISHIBE ,  Toshihiro HAYASHI ,  Hisaaki MIYASAKO ,  Junji ISHIHARA ,  Hirokazu MASUDA

IPC: F26B21/10 ,  F26B25/22

CPC classification number: F26B21/10 ,  F26B25/22

Abstract: According to one embodiment of the present disclosure, a drying apparatus includes a drying chamber that holds a drying processing target in an inside thereof, a decompression device that decompresses the inside of the drying chamber; and a controller that controls the decompression device to decompress the inside of the drying chamber, thereby executing a drying processing of evaporating and removing moisture from the drying processing target. The controller executes, after the drying processing, an additional decompression processing of lowering a pressure of the inside of the drying chamber below a pressure at a time of the drying processing, for a predetermined time and determines a dry condition of the drying processing target based on a pressure of the inside of the drying chamber that has been reached after the additional decompression processing.