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公开(公告)号：US20220026396A1
公开(公告)日：2022-01-27
申请号：US17413374
申请日：2018-12-20
Applicant: Shimadzu Corporation
Inventor： Takahide HATAHORI , Kenji TAKUBO , Koki YOSHIDA
Abstract: A defect inspection apparatus (100) is provided with and an excitation unit (1) for exciting elastic waves, an irradiation unit (2) for emitting laser light, a measurement unit (3) for measuring interference light, and a control unit (4). The control unit is configured to acquire an image (61) representing a vibration state of an inspection target object (7) in a measurement area based on a measurement result of the measurement unit (3), detect a discontinuous portion in a vibration state in the measurement area from the image representing the vibration state as a defect (73), and identify a type of the defect based on at least one of a shape (62) of the detected defect and the vibration state of a defective portion.
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公开(公告)号：US20230114484A1
公开(公告)日：2023-04-13
申请号：US17964884
申请日：2022-10-12
Applicant: SHIMADZU CORPORATION
Inventor： Tomotaka NAGASHIMA , Takahide HATAHORI , Hisanori MORITA , Kenji TAKUBO
Abstract: An inspection system includes an image processing unit that suppresses noise of a complex number image on which pixels are represented by a complex number indicating a periodic change in a vibration state of an inspection target. The image processing unit acquires a degree of similarity between a pixel included in a target image region defined in the complex number image and a pixel included in a plurality of reference image regions defined in the complex number image separately from the target image region by comparing complex numbers representing pixels, and executes noise suppression processing of the target image region by using a weight based on the acquired degree of similarity.
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公开(公告)号：US20220034822A1
公开(公告)日：2022-02-03
申请号：US17413401
申请日：2019-01-29
Applicant: Shimadzu Corporation
Inventor： Takahide HATAHORI , Kenji TAKUBO
Abstract: A displacement measurement device 10 is provided with: a laser light source 11 for emitting laser light to a measurement area R of a measurement target object S; a focusing optical system (the beam splitter 151, the first reflecting mirror 1521, the condenser lens 155) having a front focal point in the measurement area R and a rear focal point on a predetermined imaging surface (the detection surface 1561); a non-focusing optical system (the beam splitter 151, the diffuser 153, the second reflecting mirror 1522, and the condenser lens 155) in which light from a measurement area R of a correspondence point in the measurement area corresponding to each point of the imaging surface with respect to the focusing optical system is incident on the point of the imaging surface; and a photodetector (image sensor 156) configured to detect light intensity on the imaging surface for each point. Thus, corresponding to each of a large number of points in the measurement area R, main reflected light reflected at the point and reference light reflected at the surrounding range of the point are incident on each of a large number of points in the imaging surface, and the main reflected light and the reference light interfere at a large number of points in the imaging surface. Thus, an interference pattern is obtained.
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公开(公告)号：US20190204275A1
公开(公告)日：2019-07-04
申请号：US16311839
申请日：2016-06-21
Applicant: Shimadzu Corporation
Inventor： Takahide HATAHORI , Yuya NAGATA , Kenji TAKUBO
CPC classification number: G01N29/069 , G01B9/02098 , G01H3/125 , G01H9/002 , G01N29/043 , G01N29/0654 , G01N29/2418 , G01N29/345 , G01N29/36 , G01N29/4472 , G01N2291/0289 , G01N2291/263
Abstract: The defect inspection device is provided with a sound wave excitation unit for exciting a sound wave having a time waveform represented by a continuous periodic function to a prescribed position on the surface of an object to be measured, a displacement amount measurement unit for measuring a periodically varying displacement amount generated by the propagation of the sound wave from the prescribed position through the surface at at least three different phases of the periodic variation, and a periodic function acquisition unit for determining a periodic function expressing the periodic variation of the physical quantity on the basis of the displacement amount at the at least three different phases.
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公开(公告)号：US20240230601A1
公开(公告)日：2024-07-11
申请号：US18290270
申请日：2022-03-25
Applicant: SHIMADZU CORPORATION
Inventor： Hiroshi HORIKAWA , Kenji TAKUBO , Takahide HATAHORI
CPC classification number: G01N29/2418 , G01N29/041 , G01N29/32 , G01N2291/0289
Abstract: A defect inspection apparatus (100) according to the present invention includes an exciter (1), an irradiator (laser illuminator 2) configured to irradiate an inspection target (8) with laser light, and a measurer (3) configured to change a phase of the laser light reflected by the inspection target (8) to cause the laser light having an unchanged phase to interfere with the laser light having a changed phase, and to measure the interference light. The measurer (3) is configured to acquire an interference image (71) representing a vibration state of the inspection target (8) as viewed in a direction extending along a first light path (21), and an interference image (72) representing a vibration state of the inspection target (8) as viewed in a direction extending along a second light path (22) in which the reflected laser light travels from the inspection target (8) in a direction different from the first light path (21).
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Patent Agency Ranking
公开(公告)号：US20230304787A1
公开(公告)日：2023-09-28
申请号：US18075419
申请日：2022-12-06
Applicant: SHIMADZU CORPORATION
Inventor： Tomotaka NAGASHIMA , Takahide HATAHORI , Kenji TAKUBO
CPC classification number: G01B9/02095 , G01H1/14
Abstract: In a defect detection device (10), an exciter (11) gives a test object (S) a vibration with a variable frequency. A vibration state measurer (15, 163) performs a measurement of the vibration state of the surface of the test object by an optical means while the vibration is given to the test object, and determines, for each position on the surface, a numerical value representing the vibration state based on a result of the measurement. A judgment-index-value determiner (164) determines a judgment index value by Fourier transform based on the numerical value representing the vibration state at each position, where the judgment index value is a numerical value representing a strength of the vibration for each wavenumber. A wavenumber-wavelength determiner (165) determines, based on the judgment index value determined for each wavenumber, a wavenumber or wavelength of an elastic wave induced in the test object by the vibration.
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公开(公告)号：US20230062821A1
公开(公告)日：2023-03-02
申请号：US17792405
申请日：2020-10-12
Applicant: SHIMADZU CORPORATION
Inventor： Koki YOSHIDA , Kenji TAKUBO , Takahide HATAHORI
IPC: G01B9/02 , G01N29/12 , G01N29/04 , G01B9/02098 , G01N29/44
Abstract: A defect inspection device (100) includes an excitation unit that excites an elastic wave, an irradiation unit (2) that applies laser lights, a measurement unit (3) that measures the interfered laser lights, and a control unit that acquires vibration state information which is information about a state of the elastic wave excited in an inspection target (P) for a plurality of frequencies by changing a frequency of excitation vibration caused by the excitation unit in order to excite the elastic wave in the inspection target (P), and extracts recommended frequencies (F) recommended for inspecting a defect of the inspection target (P) from among the plurality of frequencies based on the acquired vibration state information for the plurality of frequencies.
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公开(公告)号：US20210270777A1
公开(公告)日：2021-09-02
申请号：US17255975
申请日：2019-05-21
Applicant: Shimadzu Corporation
Inventor： Takahide HATAHORI , Yuya NAGATA , Kenji TAKUBO
Abstract: A defect detection device 10 includes: an excitation source 11 capable of being placed at any position on a surface of an inspection target object S, the excitation source 11 being configured to excite an elastic wave within the inspection target object S, the elastic wave being predominant in one vibration mode and propagating in a predetermined direction; an illumination unit (pulsed laser light source 13, illumination light lens 14) configured to perform stroboscopic illumination on an illumination area of the surface of the inspection target object by using a laser light source; a displacement measurement unit (speckle shearing interferometer 15) configured to collectively measure a displacement of each point in a front-back direction within the illumination area in at least three different phases of the elastic wave, by speckle interferometry or speckle shearing interferometry; and a reflected wave/scattered wave detector 16 configured to detect either one or both of a reflected wave and a scattered wave of the elastic wave, based on the displacement measured by the displacement measurement unit.
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公开(公告)号：US20210164897A1
公开(公告)日：2021-06-03
申请号：US17042010
申请日：2018-12-13
Applicant: Shimadzu Corporation
Inventor： Takahide HATAHORI , Kenji TAKUBO
Abstract: A defect detection device 10 is provided with: a laser light source 11 for irradiating laser light to a measurement region R of a surface of an inspection object S; a laser light source control unit 15 for controlling the laser light source so as to cause laser light to be outputted continuously or quasi-continuously for a time longer than a period of vibration generated in the inspection object; an interferometer (speckle shearing interferometer 14) for generating interference light in which reflected light of the laser light reflected in the measurement region and reference laser light emitted from the laser light source 11 interfere; a detector (image sensor 145) for detecting the intensity of the interference light for each point in the measurement region R; a phase shifter 143 for shifting the phase of the reflected laser light or the reference laser light; an integrated intensity pattern determination unit 16 for obtaining an integrated intensity obtained by integrating the intensity for each point over an integration time longer the period of the vibration in three or more phases, the phase being shifted by the phase shifter 143 into three or more different phases; an interference degree distribution generation unit 17 for obtaining the distribution of the degree of interference based on the integrated intensity obtained in each of the three or more phases for each point; and a defect detection unit 18 for detecting a defect in the measurement region R based on the distribution of the degree of interference in the measurement region R.
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公开(公告)号：US20230313103A1
公开(公告)日：2023-10-05
申请号：US18022592
申请日：2021-07-07
Applicant: Shimadzu Corporation
Inventor： Tsunehiro INOUE , Toyoyuki HASHIMOTO , Yasuko YONEDA , Kenji TAKUBO , Yoichi FUJIYAMA , Tomoki OHKUBO , Eiichi OZEKI , Ryogo TAKAI , Hiroomi GOTO , Sadamu TOMITA
Abstract: A cell culture container includes: a container body; a cell culture insert having a tubular portion and an oxygen-permeable membrane; and a lid member. The container body is provided with an opening that communicates with an interior of the container body. The tubular portion includes an upper end and a lower end, and is inserted in the opening such that the lower end is located inside the container body. The lower end side of the tubular portion is closed by the membrane. The upper end side of the tubular portion is closed by the lid member. The lid member includes a lower surface that faces toward an interior of the tubular portion. The lid member is provided with an electrode insertion port and a culture medium outlet port that each communicate with the interior of the tubular portion at the lower surface.
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