MANUFACTURING METHOD OF LIQUID JET HEAD, LIQUID JET HEAD, AND LIQUID JET APPARATUS

    公开(公告)号:US20170129239A1

    公开(公告)日:2017-05-11

    申请号:US15337658

    申请日:2016-10-28

    Abstract: A manufacturing method of a liquid jet head includes: a groove formation step of forming ejection grooves and non-ejection grooves alternately in the upper surface of an actuator substrate; a cover plate processing step of forming a recessed portion in the upper surface of a cover plate and slits penetrating from the bottom surface of the recessed portion to the lower surface opposite to the upper surface; an electrode formation step of forming conductive films on the both side surfaces and front surface of the ejection grooves, the both side surfaces of the non-ejection grooves, the inner surfaces of the slits and the recessed portion, and the lower surface of the cover plate; and a substrate joining step of joining the lower surface of the cover plate to the upper surface of the actuator substrate so as to communicate the slits with the ejection grooves.

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