Exposure device and exposure method

    公开(公告)号:US09851642B2

    公开(公告)日:2017-12-26

    申请号:US15091005

    申请日:2016-04-05

    Abstract: An exposure device includes a rotation driving section that rotationally drives an exposure object; a light irradiation section that irradiates an exposure surface of the exposure object with laser light; a slide moving section secured to the rotation driving section or the light irradiation section, and moving the rotation driving section or the light irradiation section along the exposure surface in a direction crossing a direction of rotation of the rotation driving section; a signal generating section that transmits an analog modulating signal to the light irradiation section in accordance with a rotation synchronization signal from the rotation driving section, the analog modulating signal causing an intensity of the laser light to be changed; and a controlling section that controls movements of the rotation driving section, the slide moving section, and the light irradiation section.

    DISPENSING APPARATUS, ANALYZER AND METHOD FOR CONTROLLING DISPENSING APPARATUS
    5.
    发明申请
    DISPENSING APPARATUS, ANALYZER AND METHOD FOR CONTROLLING DISPENSING APPARATUS 审中-公开
    分配装置,分析仪和控制分配装置的方法

    公开(公告)号:US20140170026A1

    公开(公告)日:2014-06-19

    申请号:US14099284

    申请日:2013-12-06

    CPC classification number: G01N35/1011 G01N2035/00524 G01N2035/1058

    Abstract: There is provided a dispensing apparatus including a dispensing unit; and a drive mechanism. The dispensing unit is configured to support a dispensing nozzle, provide the dispensing nozzle with a material to be dispensed, and allow the dispensing nozzle to discharge the material. The drive mechanism is configured to change relative position between a stage and the dispensing nozzle in a second direction and a third direction, where the second direction is a horizontal direction when a first direction is substantially vertical direction, and the third direction is substantially perpendicular to the first direction and to the second direction.

    Abstract translation: 提供一种包括分配单元的分配装置; 和驱动机构。 分配单元构造成支撑分配喷嘴,为分配喷嘴提供待分配的材料,并允许分配喷嘴排出材料。 所述驱动机构被构造成在第一方向为大致垂直方向的第二方向和第三方向上改变台与分注喷嘴之间的相对位置,其中所述第二方向为水平方向,并且所述第三方向基本上垂直于 第一个方向和第二个方向。

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