公开(公告)号：US20240263303A1

公开(公告)日：2024-08-08

申请号：US18105828

申请日：2023-02-04

Applicant: SPTS Technologies Ltd.

Inventor： Michael Grimes ,  Yuyuan Lin

IPC: C23C16/40 ,  C23C16/455

CPC classification number: C23C16/403 ,  C23C16/45527 ,  H01L21/02178

Abstract: An inert coating is applied to less than an entirety of a surface of a substrate to form exposed regions on the substrate between the inert coating. Precursors are introduced around the substrate thereby forming a polymer coating directly on the exposed regions of the substrate. The polymer coating can be adsorbed on the exposed regions of the substrate.