Semiconductor Device and Method of Forming Graphene Core Shell Embedded Within Shielding Layer

    公开(公告)号:US20240128200A1

    公开(公告)日:2024-04-18

    申请号:US18046028

    申请日:2022-10-12

    CPC classification number: H01L23/552 H01L21/56 H01L23/3128 H01L23/5383

    Abstract: A semiconductor device has a substrate and an electrical component disposed over the substrate. An encapsulant is deposited over the electrical component and substrate. A shielding layer has a graphene core shell formed on a surface of the encapsulant. The shielding layer can be printed on the encapsulant. The graphene core shell includes a copper core. The shielding layer has a plurality of cores covered by graphene and the graphene is interconnected within the shielding layer to form an electrical path. The shielding layer also has thermoset material or polymer or composite epoxy type matrix and the graphene core shell is embedded within the matrix. A shielding material can be disposed around the electrical component. The electrical path dissipates any charge incident on shielding layer, such as an ESD event, to reduce or inhibit the effects of EMI, RFI, and other inter-device interference.

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