PHOTONIC DEVICE AND METHOD
    1.
    发明申请

    公开(公告)号:US20250155640A1

    公开(公告)日:2025-05-15

    申请号:US18922884

    申请日:2024-10-22

    Abstract: A method of manufacturing a photonic device comprises, successively, forming on a first substrate at least one metallization level and a first bonding layer, forming on a second high-resistivity substrate a second bonding layer, bonding the first bonding layer to the second bonding layer, removing the first substrate; and forming a first optical component on the at least one metallization level. A sum of the thicknesses of the first and second bonding layers and of the thickness of the at least one metallization level is greater than 3 μm.

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