公开(公告)号：US09165861B2

公开(公告)日：2015-10-20

申请号：US14287343

申请日：2014-05-27

Applicant: STMicroelectronics SA ,  STMicroelectronics (Crolles 2) SAS

Inventor： Pierre Bar ,  Simon Gousseau ,  Yann Beilliard

IPC: H01L23/427 ,  H01L23/48 ,  H01L21/768 ,  H01L23/367 ,  H01L23/00

CPC classification number: H01L23/481 ,  H01L21/76898 ,  H01L23/3677 ,  H01L23/4275 ,  H01L24/16 ,  H01L24/73 ,  H01L2224/16235 ,  H01L2224/73204

Abstract: A method for producing at least one through-silicon via inside a substrate may include forming a cavity in the substrate from a first side of the substrate until an electrically conductive portion is emerged onto. The method may also include forming an electrically conductive layer at a bottom and on walls of the cavity, and at least partly on a first side outside the cavity. The process may further include at least partially filling the cavity with at least one phase-change material. Another aspect is directed to a three-dimensional integrated structure.

Abstract translation: 用于在衬底内部生产至少一个穿硅的方法可包括在衬底的第一侧从衬底的第一侧形成空腔，直到导电部分出现。 该方法还可以包括在空腔的底部和壁上形成导电层，并且至少部分地在空腔外部的第一侧上形成导电层。 该方法还可以包括用至少一种相变材料至少部分地填充空腔。 另一方面涉及三维综合结构。

公开(公告)号：US20150262908A1

公开(公告)日：2015-09-17

申请号：US14643837

申请日：2015-03-10

Applicant: STMicroelectronics SA ,  STMicroelectronics (Crolles 2) SAS

Inventor： Pascal Ancey ,  Simon Gousseau ,  Olga Kokshagina

IPC: H01L23/427 ,  H01L21/48 ,  F28D15/04 ,  H01L21/3065 ,  H01L21/02 ,  H01L23/367 ,  H01L23/473 ,  H01L21/3205

CPC classification number: H01L23/427 ,  F28D15/04 ,  F28D15/046 ,  F28D2015/0225 ,  H01L21/02164 ,  H01L21/30655 ,  H01L21/32051 ,  H01L21/32056 ,  H01L21/4803 ,  H01L23/367 ,  H01L23/473 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method of manufacturing a heat pipe, including the steps of: forming in a substrate a cylindrical opening provided with a plurality of ring-shaped recessed radially extending around a central axis of the opening; arranging in the recesses separate ring-shaped strips made of a material catalyzing the growth of carbon nanotubes; and growing carbon nanotubes in the opening from said ring-shaped strips.

Abstract translation: 一种制造热管的方法，包括以下步骤：在基板上形成圆柱形开口，所述圆柱形开口设置有围绕所述开口的中心轴线径向延伸的多个环状凹部; 在凹部中排列分离由催化碳纳米管生长的材料制成的环形条; 以及在所述环形条的开口中生长碳纳米管。

公开(公告)号：US10186474B2

公开(公告)日：2019-01-22

申请号：US15816990

申请日：2017-11-17

Applicant: STMICROELECTRONICS SA ,  STMICROELECTRONICS (CROLLES 2) SAS

Inventor： Pascal Ancey ,  Simon Gousseau ,  Olga Kokshagina

IPC: H01L23/52 ,  H01L23/532 ,  H01L21/768 ,  H01L29/80 ,  H01L23/34 ,  H01L23/427 ,  H01L23/473 ,  H01L21/48 ,  H01L21/3205 ,  H01L21/3065 ,  H01L21/02 ,  H01L23/367 ,  F28D15/04 ,  F28D15/02

Abstract: A method of manufacturing a heat pipe, including the steps of: forming in a substrate a cylindrical opening provided with a plurality of ring-shaped recessed radially extending around a central axis of the opening; arranging in the recesses separate ring-shaped strips made of a material catalyzing the growth of carbon nanotubes; and growing carbon nanotubes in the opening from said ring-shaped strips.

公开(公告)号：US09953895B2

公开(公告)日：2018-04-24

申请号：US14643837

申请日：2015-03-10

Applicant: STMicroelectronics SA ,  STMicroelectronics (Crolles 2) SAS

Inventor： Pascal Ancey ,  Simon Gousseau ,  Olga Kokshagina

IPC: H01L21/768 ,  H01L23/34 ,  H01L23/48 ,  H05K7/20 ,  F28D15/04 ,  H01L23/427 ,  H01L23/473 ,  H01L21/48 ,  H01L21/3205 ,  H01L21/3065 ,  H01L21/02 ,  H01L23/367 ,  F28D15/02

CPC classification number: H01L23/427 ,  F28D15/04 ,  F28D15/046 ,  F28D2015/0225 ,  H01L21/02164 ,  H01L21/30655 ,  H01L21/32051 ,  H01L21/32056 ,  H01L21/4803 ,  H01L23/367 ,  H01L23/473 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method of manufacturing a heat pipe, including the steps of: forming in a substrate a cylindrical opening provided with a plurality of ring-shaped recessed radially extending around a central axis of the opening; arranging in the recesses separate ring-shaped strips made of a material catalyzing the growth of carbon nanotubes; and growing carbon nanotubes in the opening from said ring-shaped strips.

公开(公告)号：US20180076114A1

公开(公告)日：2018-03-15

申请号：US15816990

申请日：2017-11-17

Applicant: STMICROELECTRONICS SA ,  STMICROELECTRONICS (CROLLES 2) SAS

Inventor： Pascal Ancey ,  Simon Gousseau ,  Olga Kokshagina

IPC: H01L23/427 ,  H01L21/3205 ,  F28D15/04 ,  H01L23/473 ,  H01L23/367 ,  H01L21/48 ,  H01L21/3065 ,  H01L21/02 ,  F28D15/02

CPC classification number: H01L23/427 ,  F28D15/04 ,  F28D15/046 ,  F28D2015/0225 ,  H01L21/02164 ,  H01L21/30655 ,  H01L21/32051 ,  H01L21/32056 ,  H01L21/4803 ,  H01L23/367 ,  H01L23/473 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method of manufacturing a heat pipe, including the steps of: forming in a substrate a cylindrical opening provided with a plurality of ring-shaped recessed radially extending around a central axis of the opening; arranging in the recesses separate ring-shaped strips made of a material catalyzing the growth of carbon nanotubes; and growing carbon nanotubes in the opening from said ring-shaped strips.