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公开(公告)号:US20230201864A1
公开(公告)日:2023-06-29
申请号:US17987334
申请日:2022-11-15
Applicant: Samsung Display Co., Ltd.
Inventor: KYUNGEUN LEE , SUIN KIM , YONG-KWAN KIM , CHULHO YOON , SEUNGJUN LEE , JINNYOUNG HEO
CPC classification number: B05C9/14 , B29C35/0805 , B29C2035/0827
Abstract: A stage includes a bottom portion, a plurality of support portions extending in a first direction and spaced apart from each other in a second direction crossing the first direction, a plurality of blocks coupled with the support portions, respectively, and a plurality of porous films covering upper surfaces of the blocks, respectively.