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公开(公告)号:US12094846B2
公开(公告)日:2024-09-17
申请号:US18349017
申请日:2023-07-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jae Ho Ahn , Ji Won Kim , Sung-Min Hwang , Joon-Sung Lim , Suk Kang Sung
IPC: H01L25/065 , H01L21/768 , H01L23/00 , H01L23/535 , H01L25/18 , H10B41/27 , H10B43/27
CPC classification number: H01L24/08 , H01L21/76805 , H01L21/76895 , H01L23/535 , H01L25/0657 , H01L25/18 , H10B41/27 , H10B43/27 , H01L2224/08145 , H01L2924/1431 , H01L2924/14511
Abstract: A nonvolatile memory device including a substrate extending in a first direction, a ground selection line extending in the first direction on the substrate, a plurality of word lines stacked sequentially on the ground selection line and extending in the first direction, a landing pad spaced apart from the ground selection line and the plurality of word lines in the first direction, a rear contact plug connected to a lower face of the landing pad and extending in a second direction intersecting the first direction, a front contact plug connected to an upper face of the landing pad opposite the lower face and extending in the second direction, an input/output pad electrically connected to the rear contact plug, and an upper bonding pad electrically connected to the front contact plug and connected to at least a part of a plurality of circuit elements of the nonvolatile memory device.
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公开(公告)号:US20230413545A1
公开(公告)日:2023-12-21
申请号:US18365915
申请日:2023-08-04
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sung Min Hwang , Joon Sung Lim , Bum Kyu Kang , Jae Ho Ahn
IPC: H10B41/27 , H01L23/535
CPC classification number: H10B41/27 , G11C16/0483 , H01L23/535
Abstract: A three-dimensional semiconductor device includes a first gate group on a lower structure and a second gate group on the first gate group. The first gate group includes first pad regions that are: (1) lowered in a first direction that is parallel to an upper surface of the lower structure and (2) raised in a second direction that is parallel to an upper surface of the lower structure and perpendicular to the first direction. The second gate group includes second pad regions that are sequentially raised in the first direction and raised in the second direction.
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公开(公告)号:US12127402B2
公开(公告)日:2024-10-22
申请号:US18365915
申请日:2023-08-04
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sung Min Hwang , Joon Sung Lim , Bum Kyu Kang , Jae Ho Ahn
IPC: H10B41/27 , H01L23/535 , G11C16/04
CPC classification number: H10B41/27 , H01L23/535 , G11C16/0483
Abstract: A three-dimensional semiconductor device includes a first gate group on a lower structure and a second gate group on the first gate group. The first gate group includes first pad regions that are: (1) lowered in a first direction that is parallel to an upper surface of the lower structure and (2) raised in a second direction that is parallel to an upper surface of the lower structure and perpendicular to the first direction. The second gate group includes second pad regions that are sequentially raised in the first direction and raised in the second direction.
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公开(公告)号:US20240014157A1
公开(公告)日:2024-01-11
申请号:US18349017
申请日:2023-07-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jae Ho Ahn , Ji Won Kim , Sung-Min Hwang , Joon-Sung Lim , Suk Kang Sung
IPC: H01L23/00 , H01L25/065 , H01L25/18 , H01L23/535 , H01L21/768 , H10B41/27 , H10B43/27
CPC classification number: H01L24/08 , H01L25/0657 , H01L25/18 , H01L23/535 , H01L21/76805 , H01L21/76895 , H10B41/27 , H10B43/27 , H01L2924/14511 , H01L2224/08145 , H01L2924/1431
Abstract: A nonvolatile memory device including a substrate extending in a first direction, a ground selection line extending in the first direction on the substrate, a plurality of word lines stacked sequentially on the ground selection line and extending in the first direction, a landing pad spaced apart from the ground selection line and the plurality of word lines in the first direction, a rear contact plug connected to a lower face of the landing pad and extending in a second direction intersecting the first direction, a front contact plug connected to an upper face of the landing pad opposite the lower face and extending in the second direction, an input/output pad electrically connected to the rear contact plug, and an upper bonding pad electrically connected to the front contact plug and connected to at least a part of a plurality of circuit elements of the nonvolatile memory device.
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公开(公告)号:US11715712B2
公开(公告)日:2023-08-01
申请号:US17323076
申请日:2021-05-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sung-Min Hwang , Ji Won Kim , Jae Ho Ahn , Joon-Sung Lim , Suk Kang Sung
IPC: H01L23/00 , H01L25/065 , H01L25/18
CPC classification number: H01L24/08 , H01L23/562 , H01L25/0657 , H01L25/18 , H01L2224/08145 , H01L2924/1431 , H01L2924/14511 , H01L2924/3511
Abstract: A nonvolatile memory device includes an upper insulating layer. A first substrate is on the upper insulating layer. An upper interlayer insulating layer is on the first substrate. A plurality of word lines is stacked on the first substrate in a first direction and extends through a partial portion of the upper interlayer insulating layer. A lower interlayer insulating layer is on the upper interlayer insulating layer. A second substrate is on the lower interlayer insulating layer. A lower insulating layer is on the second substrate. A dummy pattern is composed of dummy material. The dummy pattern is disposed in a trench formed in at least one of the first and second substrates. The trench is formed on at least one of a surface where the upper insulating layer meets the first substrate, and a surface where the lower insulating layer meets the second substrate.
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公开(公告)号:US11315947B2
公开(公告)日:2022-04-26
申请号:US16890115
申请日:2020-06-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jae Ho Ahn , Sung-Min Hwang , Joon-Sung Lim , Bum Kyu Kang , Sang Don Lee
IPC: H01L27/11582 , H01L27/11524 , H01L27/11565 , H01L27/11519 , H01L27/1157 , H01L27/11556
Abstract: A nonvolatile memory device including a mold structure including a plurality of gate electrodes on a substrate, the plurality of gate electrodes including first, second, and third string selection lines sequentially stacked on the substrate; a channel structure that penetrates the mold structure and intersects each of the gate electrodes; a first cutting region that cuts each of the gate electrodes; a second cutting region that is spaced apart from the first cutting region in a first direction and cuts each of the gate electrodes; a first cutting line that cuts the first string selection line between the first cutting region and the second cutting region; a second cutting line that cuts the second string selection line between the first cutting region and the second cutting region; and a third cutting line that cuts the third string selection line between the first cutting region and the second cutting region.
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公开(公告)号:US12232318B2
公开(公告)日:2025-02-18
申请号:US17726899
申请日:2022-04-22
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jae Ho Ahn , Sung-Min Hwang , Joon-Sung Lim , Bum Kyu Kang , Sang Don Lee
Abstract: A nonvolatile memory device including a mold structure including a plurality of gate electrodes on a substrate, the plurality of gate electrodes including first, second, and third string selection lines sequentially stacked on the substrate; a channel structure that penetrates the mold structure and intersects each of the gate electrodes; a first cutting region that cuts each of the gate electrodes; a second cutting region that is spaced apart from the first cutting region in a first direction and cuts each of the gate electrodes; a first cutting line that cuts the first string selection line between the first cutting region and the second cutting region; a second cutting line that cuts the second string selection line between the first cutting region and the second cutting region; and a third cutting line that cuts the third string selection line between the first cutting region and the second cutting region.
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公开(公告)号:US11844211B2
公开(公告)日:2023-12-12
申请号:US17340148
申请日:2021-06-07
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jae Ho Ahn , Ji Won Kim , Sung-Min Hwang , Joon-Sung Lim , Suk Kang Sung
IPC: H10B41/27 , H01L23/538 , H01L25/065 , H10B43/27
CPC classification number: H10B41/27 , H01L23/5384 , H01L25/0657 , H10B43/27
Abstract: A semiconductor memory device comprising: a first semiconductor chip including an upper input/output pad, a second semiconductor chip including a lower input/output pad, and a substrate attachment film attaching the first and second semiconductor chips. The first and second semiconductor chips each include a first substrate including a first side facing the substrate attachment film and a second side, a mold structure including gate electrodes, a channel structure penetrating the mold structure and intersecting the gate electrodes, a second substrate including a third side facing the first side and a fourth side, a first circuit element on the third side of the second substrate, and a contact via penetrating the first substrate and connected to the first circuit element. The upper and lower input/output pads are on the second sides of the first and second semiconductor chip, respectively, and contact the contact vias of the first and second semiconductor chips.
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公开(公告)号:US11758719B2
公开(公告)日:2023-09-12
申请号:US17391289
申请日:2021-08-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sung Min Hwang , Joon Sung Lim , Bum Kyu Kang , Jae Ho Ahn
IPC: H10B41/27 , H01L23/535 , G11C16/04
CPC classification number: H10B41/27 , H01L23/535 , G11C16/0483
Abstract: A three-dimensional semiconductor device includes a first gate group on a lower structure and a second gate group on the first gate group. The first gate group includes first pad regions that are: (1) lowered in a first direction that is parallel to an upper surface of the lower structure and (2) raised in a second direction that is parallel to an upper surface of the lower structure and perpendicular to the first direction. The second gate group includes second pad regions that are sequentially raised in the first direction and raised in the second direction.
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公开(公告)号:US11728304B2
公开(公告)日:2023-08-15
申请号:US17240641
申请日:2021-04-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jae Ho Ahn , Ji Won Kim , Sung-Min Hwang , Joon-Sung Lim , Suk Kang Sung
IPC: H01L25/065 , H01L23/00 , H01L25/18 , H01L23/535 , H01L21/768 , H10B41/27 , H10B43/27
CPC classification number: H01L24/08 , H01L21/76805 , H01L21/76895 , H01L23/535 , H01L25/0657 , H01L25/18 , H10B41/27 , H10B43/27 , H01L2224/08145 , H01L2924/1431 , H01L2924/14511
Abstract: A nonvolatile memory device including a substrate extending in a first direction, a ground selection line extending in the first direction on the substrate, a plurality of word lines stacked sequentially on the ground selection line and extending in the first direction, a landing pad spaced apart from the ground selection line and the plurality of word lines in the first direction, a rear contact plug connected to a lower face of the landing pad and extending in a second direction intersecting the first direction, a front contact plug connected to an upper face of the landing pad opposite the lower face and extending in the second direction, an input/output pad electrically connected to the rear contact plug, and an upper bonding pad electrically connected to the front contact plug and connected to at least a part of a plurality of circuit elements of the nonvolatile memory device.
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