THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE

    公开(公告)号:US20200303390A1

    公开(公告)日:2020-09-24

    申请号:US16782737

    申请日:2020-02-05

    Abstract: A semiconductor memory device includes a stack structure including electrodes and insulating layers alternately stacked on a substrate, and a vertical channel structure penetrating the stack structure. The vertical channel structure includes a semiconductor pattern and a vertical insulating layer between the semiconductor pattern and the electrodes. The vertical insulating layer includes a charge storage layer, a filling insulating layer, and a tunnel insulating layer. The vertical insulating layer has a cell region between the semiconductor pattern and each electrode and a cell separation region between the semiconductor pattern and each insulating layer. A portion of the charge storage layer of the cell region is in physical contact with the tunnel insulating layer. The filling insulating layer is between the semiconductor pattern and a remaining portion of the charge storage layer of the cell region.

    Three-dimensional semiconductor memory device and method of operating the same

    公开(公告)号:US10396093B2

    公开(公告)日:2019-08-27

    申请号:US15714254

    申请日:2017-09-25

    Abstract: A three-dimensional (3D) semiconductor memory device includes an electrode structure including a plurality of cell electrodes vertically stacked on a substrate and extending in a first direction, lower and upper string selection electrodes sequentially stacked on the electrode structure, a first vertical structure penetrating the lower and upper string selection electrodes and the electrode structure, a second vertical structure spaced apart from the upper string selection electrode and penetrating the lower string selection electrode and the electrode structure, and a first bit line intersecting the electrode structure and extending in a second direction different from the first direction. The first bit line is connected in common to the first and second vertical structures. The second vertical structure does not extend through the upper string selection electrode.

    Three-dimensional semiconductor memory device

    公开(公告)号:US10032789B2

    公开(公告)日:2018-07-24

    申请号:US15208669

    申请日:2016-07-13

    Abstract: Provided is a three-dimensional semiconductor memory device including a peripheral logic structure on a semiconductor substrate to include peripheral logic circuits and a lower insulating gapfill layer, a horizontal semiconductor layer on the peripheral logic structure, stacks on the horizontal semiconductor layer, each of the stacks including a plurality of electrodes vertically stacked on the horizontal semiconductor layer, and a plurality of vertical structures passing through the stacks and connected to the horizontal semiconductor layer. The horizontal semiconductor layer may include a first semiconductor layer disposed on the lower insulating gapfill layer and co-doped with an anti-diffusion material and first conductivity type impurities of a first impurity concentration, and a second semiconductor layer disposed on the first semiconductor layer and doped with first conductivity type impurities of a second impurity concentration lower than the first impurity concentration or undoped.

    SEMICONDUCTOR DEVICE
    7.
    发明申请

    公开(公告)号:US20250040176A1

    公开(公告)日:2025-01-30

    申请号:US18629093

    申请日:2024-04-08

    Abstract: A semiconductor device includes a peripheral circuit structure and a cell structure stacked on the peripheral circuit structure. The cell structure includes a plurality of gate electrodes spaced apart from each other in a vertical direction, a channel structure passing through the plurality of gate electrodes and extending in the vertical direction, the channel structure having a first end close to the peripheral circuit structure and a second end opposite to the first end, and a common source layer covering the second end of the channel structure. The channel structure includes a channel layer extending in the vertical direction, the common source layer includes a first region and a second region that contain impurities of different conductivity types, and the first region of the common source layer is connected to at least a portion of the channel layer.

    SEMICONDUCTOR DEVICE
    9.
    发明公开

    公开(公告)号:US20240206177A1

    公开(公告)日:2024-06-20

    申请号:US18591076

    申请日:2024-02-29

    CPC classification number: H10B43/27 H01L23/5226 H01L23/535 H10B43/35

    Abstract: A semiconductor device including a stack structure including gate layers and interlayer insulating layers spaced apart in a vertical direction, a channel hole penetrating the stack structure in the vertical direction, a core region extending within the channel hole, a channel layer disposed on a side surface of the core region, a first dielectric layer, a data storage layer and a second dielectric layer, which are disposed between the channel layer and the gate layers, and a pad pattern disposed on the core region, in the channel hole, and in contact with the channel layer. A first horizontal distance between a side surface of a first portion of an uppermost gate layer and an outer side surface of the channel layer is greater than a second horizontal distance between a side surface of a second portion of the uppermost gate layer and an outer side surface of the pad pattern.

    Integrated circuit device and method of manufacturing the same

    公开(公告)号:US11974434B2

    公开(公告)日:2024-04-30

    申请号:US17824821

    申请日:2022-05-25

    CPC classification number: H10B43/27 H10B41/27 H10B41/10 H10B43/10

    Abstract: An integrated circuit device includes a plurality of conductive lines extending in a horizontal direction parallel to a main surface of a substrate and overlapping one another in a vertical direction vertical to the main surface, on the substrate, a plurality of insulation layers each between two adjacent conductive lines of the plurality of conductive lines to extend in the horizontal direction, a channel layer extending in the vertical direction in a channel hole passing through the plurality of conductive lines and the plurality of insulation layers, and a plurality of outer blocking dielectric layers between the plurality of conductive lines and the channel layer, in at least some of the plurality of conductive lines, wherein a width of each of the plurality of outer blocking dielectric layers in the horizontal direction increases toward the main surface.

Patent Agency Ranking