公开(公告)号：US20230152213A1

公开(公告)日：2023-05-18

申请号：US17967228

申请日：2022-10-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yasuhiro HIDAKA

IPC: G01N21/21 ,  G02B5/30 ,  H01L21/67

CPC classification number: G01N21/211 ,  G02B5/3066 ,  G02B5/3083 ,  H01L21/67253 ,  G01N2201/0633

Abstract: An ellipsometer capable of improving a throughput calculating ellipsometry coefficients (ψ, Δ) even when performing measurement with a combination of a light source having a wide wavelength band and a spectrometer, and an apparatus for inspecting a semiconductor device is e hid g the ellipsometer may be provided. The ellipsometer includes a polarizing optical element unit for separating reflected light into two polarization components having polarization directions that are orthogonal to each other in a radial direction with respect to an optical axis of an optical system of the reflected light, an analyzer unit for transmitting components of a direction different from the polarization directions of the two polarization components to make the two polarization components interfere with each other, and to form an interference fringe in a form of a concentric circle, an image detector for detecting the interference fringe, and processing circuitry for calculating ellipsometry coefficients from the interference fringe.

公开(公告)号：US20220003535A1

公开(公告)日：2022-01-06

申请号：US17350987

申请日：2021-06-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yasuhiro HIDAKA

IPC: G01B9/02 ,  G02B27/28 ,  G02B5/30

Abstract: An ellipsometer includes a first separation unit configured to separate a first reflected light into two reflected lights, a first polarizing optical element configured to separate each of the two reflected lights into two linearly polarized lights, a first interference device configured to form an interference fringe by allowing components of the two linearly polarized lights to interfere with each other, a second separation unit configured to separate a second reflected light into two reflected lights, a second polarizing optical element configured to separate each of the two reflected lights into two linearly polarized lights, and a second interference device configured to form an interference fringe by allowing components of the two linearly polarized lights to interfere with each other.

公开(公告)号：US20220074848A1

公开(公告)日：2022-03-10

申请号：US17204059

申请日：2021-03-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jaehwang JUNG ,  Yasuhiro HIDAKA ,  Mitsunori NUMATA ,  Wookrae KIM ,  Jinseob KIM ,  Myungjun LEE

IPC: G01N21/21 ,  G02B27/10 ,  G01N21/95

Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.

公开(公告)号：US20200184624A1

公开(公告)日：2020-06-11

申请号：US16444719

申请日：2019-06-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung-ho JANG ,  Yasuhiro HIDAKA ,  Young-kyu PARK ,  Ye-eun PARK ,  Yu-sin YANG

IPC: G06T7/00 ,  G02B27/09 ,  G02B26/12 ,  H04N13/239 ,  G02B5/30

Abstract: Provided is a hyperspectral imaging (HSI)-based inspection apparatus capable of quickly and stably performing two-dimensional (2D) HSI for an inspection object, and accordingly, capable of quickly and accurately inspecting the inspection object. The HSI-based inspection apparatus includes: a stage on which an inspection object is arranged; an optical system configured to allow light to be incident on the inspection object and emit the light reflected from the inspection object; a scan mirror configured to reflect the emitted light from the optical system while rotating; and a hyperspectral camera configured to obtain an image having a wavelength direction and a line direction as two axes for light reflected from the scan mirror, wherein, by using the rotation of the scan mirror, the hyperspectral camera is configured to perform the 2D HSI for the inspection object.

公开(公告)号：US20240183777A1

公开(公告)日：2024-06-06

申请号：US18334789

申请日：2023-06-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yasuhiro HIDAKA ,  Ingi KIM

IPC: G01N21/3581

CPC classification number: G01N21/3581 ,  G01N2201/06113

Abstract: A measuring apparatus includes a first beam splitter, a diffraction grating, an optical illumination system, an optical condensing system configured to condense an electromagnetic wave EH radiated from the specimen, a time domain detector configured to detect the electromagnetic wave EH, for each time when the trigger beam, light path length of which has been changed in a delay mechanism, is incident, and a controller configured to lock-in detect the electromagnetic wave EH with a driving frequency of an amplitude modulation element, wherein the controller obtains a magnitude and a direction of an electric field of the measurement portion by Fourier transforming a time domain waveform of the detected electromagnetic wave EH to obtain a frequency domain waveform, and filtering a frequency band from the obtained frequency domain waveform.

公开(公告)号：US20220003538A1

公开(公告)日：2022-01-06

申请号：US17366936

申请日：2021-07-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yasuhiro HIDAKA

IPC: G01B11/06 ,  G02B27/28 ,  G02B5/30 ,  G02B27/30 ,  G02B5/04 ,  G02B27/14 ,  G02B3/06

Abstract: An ellipsometer is provided. The ellipsometer includes: a polarizing optical element, comprising a prism, that is configured to split reflected light into two linearly polarized components of light having polarization directions orthogonal to each other, the reflected light generated by reflecting illuminated light, including linearly polarized light that is polarized in one direction, from a measurement surface of a sample; an interference member, comprising at least one body, that is configured to form at least one interference fringe in which the two linearly polarized components of light interfere with each other in directions different from the polarization directions; an image detector configured to detect the at least one interference fringe; and an analysis device including at least one processor, the analysis device configured to calculate ellipsometry coefficients Ψ and Δ based on the at least one interference fringe that is detected.

公开(公告)号：US20230204493A1

公开(公告)日：2023-06-29

申请号：US18111229

申请日：2023-02-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jaehwang JUNG ,  Yasuhiro HIDAKA ,  Mitsunori NUMATA ,  Wookrae KIM ,  Jinseob KIM ,  Myungjun LEE

IPC: G01N21/21 ,  G01N21/95 ,  G02B27/10

CPC classification number: G01N21/211 ,  G01N21/9501 ,  G02B27/10 ,  G01N2021/214

Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.

公开(公告)号：US20210156790A1

公开(公告)日：2021-05-27

申请号：US17036185

申请日：2020-09-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yasuhiro HIDAKA

IPC: G01N21/21 ,  G01B9/02 ,  G01B11/00 ,  G02B27/28

Abstract: Provided is an ellipsometer including a polarizing optical device configured to separate light, reflected from a sample that is irradiated with illumination light comprising a linearly polarized light, into a first linearly polarized light in a first polarization direction and a second linearly polarized light in a second polarization direction that is orthogonal to the first polarization direction, and a light-receiving optical system configured to calculate an Ψ and Δ, an amplitude ratio and a phase difference of the two polarized light respectively, from an interference fringe formed by interference between the first linearly polarized light and the second linearly polarized light after passing through an analyzing device with transmission axis different from the first polarization direction and the second polarization direction.