中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

107 records (took 0.019 seconds)

    Microelectromechanical devices with low inertia movable elements
    2.
    发明授权
    Microelectromechanical devices with low inertia movable elements 有权
    具有低惯性可移动元件的微机电装置

    公开(公告)号：US07312915B2

    公开(公告)日：2007-12-25

    申请号：US11135230

    申请日：2005-05-23

    Applicant: Satyadev Patel ,  Jianglong Zhang

    Inventor： Satyadev Patel ,  Jianglong Zhang

    IPC: G02B26/00 ,  G02B26/08

    CPC classification number: G02B26/0841

    Abstract: A microelectromechanical device having a movable element with low mass inertia is disclosed herein. The movable element is held on a substrate such that the element is capable of rotating relative to the substrate; and the element has a mass inertia of 1.2×10−24 kg·m2 or less.

    Abstract translation: 本文公开了具有低质量惯性的可移动元件的微机电装置。 可移动元件被保持在基板上，使得元件能够相对于基板旋转; 并且所述元件的质量惯量为1.2×10 -2 -24m 2 /小于或等于2。

    Microelectromechanical devices with low inertia movable elements
    3.
    发明申请
    Microelectromechanical devices with low inertia movable elements 有权
    具有低惯性可移动元件的微机电装置

    公开(公告)号：US20060262382A1

    公开(公告)日：2006-11-23

    申请号：US11135230

    申请日：2005-05-23

    Applicant: Satyadev Patel ,  Jianglong Zhang

    Inventor： Satyadev Patel ,  Jianglong Zhang

    IPC: G02B26/00

    CPC classification number: G02B26/0841

    Abstract: A microelectromechanical device having a movable element with low mass inertia is disclosed herein. The movable element is held on a substrate such that the element is capable of rotating relative to the substrate; and the element has a mass inertia of 1.2×10−24 kg.m2 or less.

    Abstract translation: 本文公开了具有低质量惯性的可移动元件的微机电装置。 可移动元件被保持在基板上，使得元件能够相对于基板旋转; 并且所述元件的质量惯量为1.2×10 -2 -24m 2 /小于或等于2。

    Micromirror array assembly with in-array pillars
    9.
    发明授权
    Micromirror array assembly with in-array pillars 有权
    具有阵列支柱的微镜阵列组件

    公开(公告)号：US08693082B2

    公开(公告)日：2014-04-08

    申请号：US12853411

    申请日：2010-08-10

    Applicant: Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

    Inventor： Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

    IPC: G02B26/00 ,  G02B26/08

    CPC classification number: G02B26/0841 ,  B81C3/001 ,  Y10S359/90 ,  Y10T156/10

    Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

    Abstract translation: 本发明提供了一种微结构器件，其包括多个衬底，其中器件的部件形成在衬底上。 为了保持基板之间的间隙的均匀性，提供并分布在间隙中的多个支柱以防止间隙尺寸的减小。 可以通过将支柱结合到微结构的部件来防止间隙尺寸的增加。 或者，可以通过将间隙内的压力维持在微结构将在其中操作的压力以下来防止间隙尺寸的增加。 形成微反射镜和电极的基板的电接触可以通过许多方式制成，例如电接触区域，电接触焊盘和电接触弹簧。

    Micromirror and post arrangements on substrates
    10.
    发明授权
    Micromirror and post arrangements on substrates 有权
    基板上的微镜和柱安排

    公开(公告)号：US07697193B2

    公开(公告)日：2010-04-13

    申请号：US11853812

    申请日：2007-09-11

    Applicant: Andrew Huibers ,  Satyadev Patel

    Inventor： Andrew Huibers ,  Satyadev Patel

    IPC: G02B26/00

    CPC classification number: G02B26/0841

    Abstract: A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.

    Abstract translation: 在显示系统中使用的空间光调制器的微镜阵列的微镜包括附接到由在基板上形成的两个支柱支撑的铰链的镜板。 此外，当从顶部观察时，镜板可操作以沿着平行于但偏离镜板的对角线的旋转轴线旋转。 连接两个柱的假想线不平行于镜板的任一对角线。

Patent Agency Ranking