公开(公告)号：US20160077009A1

公开(公告)日：2016-03-17

申请号：US14834418

申请日：2015-08-24

Applicant: Seagate Technology LLC

Inventor： Daniel J. Gargas ,  David M. Tung ,  Travis W. Grodt ,  Joachim W. Ahner

IPC: G01N21/65 ,  G01N21/95 ,  G01N21/84

CPC classification number: G01N21/65 ,  G01N21/8422 ,  G01N21/95 ,  G01N2201/0833

Abstract: Provided herein is an apparatus, including an excitation arm including excitation optics; a collection arm including collection optics, wherein the excitation arm and the collection arm are geometrically off-axis from one another for independent control of the excitation optics or the collection optics; and a full-surface spectroscopic analyzer to analyze a thin-film over an article from Raman-scattered light collected by the collection optics.

Abstract translation: 本文提供的装置包括包括激发光学元件的激励臂; 收集臂，其包括收集光学元件，其中所述激励臂和所述收集臂在几何上彼此偏离轴，用于独立控制所述激发光学器件或所述收集光学器件; 和全表面光谱分析仪，用于分析由收集光学器件收集的拉曼散射光的物品上的薄膜。

公开(公告)号：US10234395B2

公开(公告)日：2019-03-19

申请号：US14834418

申请日：2015-08-24

Applicant: Seagate Technology LLC

Inventor： Daniel J. Gargas ,  David M. Tung ,  Travis W. Grodt ,  Joachim W. Ahner

IPC: G01N21/65 ,  G01N21/84 ,  G01N21/95

Abstract: Provided herein is an apparatus, including an excitation arm including excitation optics; a collection arm including collection optics, wherein the excitation arm and the collection arm are geometrically off-axis from one another for independent control of the excitation optics or the collection optics; and a full-surface spectroscopic analyzer to analyze a thin-film over an article from Raman-scattered light collected by the collection optics.