公开(公告)号：US20150138341A1

公开(公告)日：2015-05-21

申请号：US14548313

申请日：2014-11-20

Applicant: Semiconductor Technologies and Instruments Pte Ltd.

Inventor： Ajharali AMANULLAH

IPC: G01N21/88 ,  H04N5/225 ,  G06T7/00

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/95684 ,  G01N2021/8812 ,  G01N2201/062 ,  G01N2201/0634 ,  H01L22/12 ,  H04N5/2256

Abstract: A component inspection process includes positioning a component (e.g., a semiconductor component or other object) such that component sidewalls are disposed along an optical path corresponding to sidewall beam splitters configured for receiving sidewall illumination provided by a set of sidewall illuminators, and transmitting this sidewall illumination therethrough, toward and to component sidewalls. Sidewall illumination incident upon component sidewalls is reflected from the component sidewalls back toward the sidewall beam splitters, which reflect or redirect this reflected sidewall illumination along an optical path corresponding to an image capture device for sidewall image capture to enable component sidewall inspection. Sidewall illuminators and sidewall beam splitters can form portions of a five sided inspection apparatus that includes a brightfield illuminator, a darkfield illuminator, and an image capture beam splitter such that the five sided inspection apparatus is configurable for inspecting component bottom surfaces and/or component sidewalls in a selective/selectable manner.

Abstract translation: 部件检查过程包括定位部件（例如，半导体部件或其他物体），使得部件侧壁沿着对应于被配置为接收由一组侧壁照明器提供的侧壁照明的侧壁分束器的光路设置，并且传送该侧壁 朝向和分配到侧壁的照明。 入射到部件侧壁上的侧壁照明从部件侧壁反射回朝向侧壁分束器，其反射或重定向该反射的侧壁照明沿着对应于用于侧壁图像捕获的图像捕获装置的光路，以实现部件侧壁检查。 侧壁照明器和侧壁分束器可以形成包括明场照明器，暗场照明器和图像捕获分束器的五面检查装置的部分，使得五面检查装置可配置用于检查部件底表面和/或部件侧壁 以选择/可选择的方式。