公开(公告)号：US20240219346A1

公开(公告)日：2024-07-04

申请号：US18522651

申请日：2023-11-29

Applicant: Sharp Display Technology Corporation

Inventor： Yuuki OOTSUKA ,  Tomohiro Kosaka ,  Tomoko Teranishi ,  Kei Ikuta ,  Reshan Maduka Abeysinghe ,  Makiko Matsumoto

IPC: G01N27/624

CPC classification number: G01N27/624

Abstract: A detector includes a first substrate, a second substrate, a first electrode, a second electrode that faces the first electrode with a gap therebetween and forms a flow path for charged particles, a third electrode that is provided on a downstream side of the flow path relative to the first electrode or the second electrode and collects the charged particles, a fourth electrode that is provided on an upstream side of the flow path relative to the first electrode, and a fifth electrode that is provided on the upstream side relative to the second electrode and generates corona discharge between the fifth electrode and the fourth electrode. The fourth electrode and the fifth electrode are disposed to be displaced relative to each other on the upstream side and the downstream side of the flow path.