DETECTION CELL, FAIMS DEVICE, AND PROGRAM
    1.
    发明公开

    公开(公告)号:US20230204541A1

    公开(公告)日:2023-06-29

    申请号:US18087269

    申请日:2022-12-22

    CPC classification number: G01N27/624

    Abstract: A detection cell includes a pair of filter electrodes, disposed separated from and opposing each other. One of the pair of filter electrodes includes a first region provided following a flow direction of an object of measurement introduced between the filter electrodes, and a second region that is provided arrayed with the first region regrading an intersecting direction intersecting the flow direction, and that protrudes to a position at which a distance of separation as to another of the pair of filter electrodes is smaller than that of the first region. First and second downstream-side electrodes are respectively disposed on downstream sides of the first and second regions, in the flow direction, and are separated from each other regarding the intersecting direction. First and second opposing electrodes are disposed on the downstream side from the other of the pair of filter electrodes, and oppose the first and second downstream-side electrodes.

    DETECTOR DEVICE
    2.
    发明公开
    DETECTOR DEVICE 审中-公开

    公开(公告)号:US20240310329A1

    公开(公告)日:2024-09-19

    申请号:US18276619

    申请日:2021-04-19

    CPC classification number: G01N27/624

    Abstract: A detector device includes a pair of filter electrodes, a collector electrode collecting charged particles that pass through a space between the pair of filter electrodes, and a detection circuit connected to the collector electrode and detecting an amount of the charged particles that are collected. The collector electrode includes an upper electrode layer having a collection surface that receives the charged particles, a lower electrode layer that is disposed opposite a surface of the upper electrode layer that is an opposite surface from the collection surface, and an insulation layer having an insulation property and disposed between the upper electrode layer and the lower electrode layer. The detection circuit is configured to be connected to one of the upper electrode layer and the lower electrode layer.

    DETECTOR
    3.
    发明公开
    DETECTOR 审中-公开

    公开(公告)号:US20240036002A1

    公开(公告)日:2024-02-01

    申请号:US18224634

    申请日:2023-07-21

    CPC classification number: G01N27/624

    Abstract: A detector includes a first electrode, second electrodes forming a flow path for charged particles between the first electrode and the second electrodes, third electrodes configured to collect the charged particles, and a fourth electrode having a sheet resistance higher than sheet resistances of the second electrodes. The fourth electrode has one end portion having a first potential in a third direction and another end portion having a second potential lower than the first potential in the third direction, the fifth electrode included in the second electrodes is connected to the fourth electrode, the sixth electrode included in the second electrodes is connected to the fourth electrode, a seventh electrode included in the third electrodes is arranged side by side with the fifth electrode along a first direction, and an eighth electrode included in the third electrodes is arranged side by side with the sixth electrode along the first direction.

    DETECTOR
    4.
    发明公开
    DETECTOR 审中-公开

    公开(公告)号:US20240027398A1

    公开(公告)日:2024-01-25

    申请号:US18222510

    申请日:2023-07-17

    CPC classification number: G01N27/624 H01J49/10

    Abstract: A detector includes a first electrode, a second electrode facing the first electrode with a space and forming a flow path for charged particles as objects to be detected between the first electrode and the second electrode, a third electrode arranged side by side with the second electrode on a downstream side in the flow path with respect to the second electrode and configured to collect the charged particles, and a potential supply circuit configured to supply a potential to at least one of the first electrode and the second electrode, in which the potential supply circuit includes a first inductor including a first input portion and a first output portion, and a second inductor including a second input portion and a second output portion, the first input portion of the first inductor is connected to a DC power supply, and the second input portion of the second inductor is connected to the first electrode or the second electrode.

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