公开(公告)号：US10003320B1

公开(公告)日：2018-06-19

申请号：US15595486

申请日：2017-05-15

Applicant: SiTime Corporation

Inventor： David Raymond Pedersen ,  Aaron Partridge ,  Thor Juneau

IPC: H03H9/24 ,  H03H3/007

CPC classification number: H03H9/2405 ,  H03H3/0072 ,  H03H9/02259 ,  H03H9/02433 ,  H03H9/2457 ,  H03H9/2468 ,  H03H2009/02456 ,  H03H2009/02496

Abstract: A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.

公开(公告)号：US09667223B1

公开(公告)日：2017-05-30

申请号：US14940069

申请日：2015-11-12

Applicant: SiTime Corporation

Inventor： David Raymond Pedersen ,  Aaron Partridge ,  Thor Juneau

IPC: H03H9/24 ,  H03H3/007

CPC classification number: H03H9/2405 ,  H03H3/0072 ,  H03H9/02259 ,  H03H9/02433 ,  H03H9/2457 ,  H03H9/2468 ,  H03H2009/02456 ,  H03H2009/02496

Abstract: A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.

公开(公告)号：US09252740B1

公开(公告)日：2016-02-02

申请号：US14300114

申请日：2014-06-09

Applicant: SiTime Corporation

Inventor： David Raymond Pedersen ,  Aaron Partridge ,  Thor Juneau

IPC: H03H9/02 ,  H03H9/24

CPC classification number: H03H9/2405 ,  H03H3/0072 ,  H03H9/02259 ,  H03H9/02433 ,  H03H9/2457 ,  H03H9/2468 ,  H03H2009/02456 ,  H03H2009/02496

Abstract: A MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system, in one embodiment, includes a MEMS resonator, electrodes, and at least one resonator electrode shield. In certain embodiments, the resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.

Abstract translation: 一种MEMS谐振器系统，其减少由不同系统元件之间的不期望的电容耦合引起的干扰信号。 在一个实施例中，该系统包括MEMS谐振器，电极和至少一个谐振器电极屏蔽。 在某些实施例中，谐振器电极屏蔽件通过防止或减少谐振器电极与支撑和辅助元件之间的电容耦合，确保谐振器电极与一个或多个分流节点或MEMS谐振器的有源元件相互作用 的MEMS谐振器结构。 通过使用一个或多个谐振器电极屏蔽减少干扰信号的有害影响，提出了相对于现有技术方法的更简单，更低干扰和更有效的系统。