公开(公告)号：US20240125659A1

公开(公告)日：2024-04-18

申请号：US18278066

申请日：2022-02-25

Applicant: TDK CORPORATION

Inventor： Masanori KOBAYASHI ,  Ken UNNO ,  Tetsuya SASAHARA ,  Kohei NAWAOKA

IPC: G01L1/22

CPC classification number: G01L1/2287

Abstract: A stacked electrode is provided on a strain resistance film, wherein: the strain resistance film contains Cr and Al; the stacked electrode has a contact layer that overlaps the strain resistance film, a diffusion prevention layer that overlaps the contact layer, and a mounting layer that overlaps the diffusion prevention layer; and the diffusion prevention layer or the mounting layer covers the contact layer so that an end surface of the contact layer is not exposed.

公开(公告)号：US20240068897A1

公开(公告)日：2024-02-29

申请号：US18454170

申请日：2023-08-23

Applicant: TDK CORPORATION

Inventor： Masanori KOBAYASHI ,  Ken UNNO ,  Tetsuya SASAHARA ,  Tetsuo HATA

IPC: G01L19/06 ,  G01L9/04 ,  G01L19/00

CPC classification number: G01L19/0627 ,  G01L9/04 ,  G01L19/0069

Abstract: There is provided a sensor member capable of suitably preventing a problem such as the intrusion of moisture or the like through an interface between an electrode and a protective film. A sensor member includes: a protected portion provided on one surface of a metal base and including a detection portion; a protective film including a first protective film portion having a first thickness and a second protective film portion having a second thickness thicker than the first thickness and formed at an opening peripheral edge of an opening leading to the protected portion, and covering at least a part of the protected portion from above; and an electrode portion including a first electrode portion disposed in the opening and connected to the protected portion, and a second electrode portion connected to the first electrode portion at an outer peripheral edge of the first electrode portion and formed on the second protective film portion.

公开(公告)号：US20220291068A1

公开(公告)日：2022-09-15

申请号：US17639167

申请日：2020-08-28

Applicant: TDK CORPORATION

Inventor： Masanori KOBAYASHI ,  Ken UNNO ,  Tetsuya SASAHARA ,  Kohei NAWAOKA

IPC: G01L19/14 ,  G01L9/04

Abstract: A sensor element suitable for miniaturization. This pressure sensor element has: a metal plate; an insulating film provided on a first surface, which is one surface of the metal plate, so as to form a covered region in which the first plate is covered and an exposed region in which the first surface is exposed; and a pressure detection circuit formed on the insulating film so as to be insulated from the first surface by means of the insulating film.

公开(公告)号：US20240175773A1

公开(公告)日：2024-05-30

申请号：US18284242

申请日：2022-03-17

Applicant: TDK CORPORATION

Inventor： Kohei NAWAOKA ,  Ken UNNO ,  Tetsuya SASAHARA ,  Masanori KOBAYASHI

IPC: G01L9/00

CPC classification number: G01L9/0051

Abstract: A distortion resistance film is capable of reducing a property change accompanying a composition change and a pressure sensor uses the distortion resistance film. The distortion resistance film is represented by a formula Cr100-x-yAlxNy, in which composition regions of x and y satisfy 25

公开(公告)号：US20240117474A1

公开(公告)日：2024-04-11

申请号：US18479526

申请日：2023-10-02

Applicant: TDK CORPORATION

Inventor： Kohei NAWAOKA ,  Ken UNNO ,  Tetsuya SASAHARA ,  Masanori KOBAYASHI ,  Tetsuo HATA

IPC: C22C27/06 ,  G01B7/16

CPC classification number: C22C27/06 ,  G01B7/18

Abstract: A strain resistance film containing a composition represented by Cr100-x-y-zAlxNyOz, satisfying 5≤x≤50, 0.1≤y≤20, 0.1≤z≤17, and y+z≤25.

公开(公告)号：US20250110000A1

公开(公告)日：2025-04-03

申请号：US18895611

申请日：2024-09-25

Applicant: TDK Corporation

Inventor： Masanori KOBAYASHI ,  Ken UNNO ,  Tetsuya SASAHARA ,  Tetsuo HATA ,  Lucie OUEDRAOGO

IPC: G01L9/00

Abstract: A sensor including: a base material having a surface on which streaks are formed along a first direction in a plan view; and a conductive film pattern formed on or above the surface and configured to connect mutually different positions in an in-plane direction of the surface in a shape in which a length of a conductive path is longer than a length of a straight line connecting the different positions, in which in a plan view, the shape of the conductive film pattern comprises a shape in which each of straight lines parallel to the first direction passes across a conductive path center line of the conductive film pattern zero times or once but does not pass across the conductive path center line twice or more.

公开(公告)号：US20240170189A1

公开(公告)日：2024-05-23

申请号：US18284003

申请日：2022-02-25

Applicant: TDK CORPORATION

Inventor： Kohei NAWAOKA ,  Ken UNNO ,  Tetsuya SASAHARA ,  Masanori KOBAYASHI

IPC: H01C10/10 ,  C22C27/06 ,  G01L9/04

CPC classification number: H01C10/10 ,  C22C27/06 ,  G01L9/04

Abstract: A distortion resistance film, etc., which includes Cr, Al, and N and in which film separation can be prevented. A distortion resistance film including an alloy material including Cr, Al, N, and Si.

公开(公告)号：US20230131075A1

公开(公告)日：2023-04-27

申请号：US17790988

申请日：2021-02-15

Applicant: TDK CORPORATION

Inventor： Masanori KOBAYASHI ,  Ken UNNO ,  Tetsuya SASAHARA ,  Kohei NAWAOKA

IPC: G01L9/00 ,  G01L9/06

Abstract: [Problem] To provide a pressure sensor that has a plurality of detection parts in a lamination direction, and moreover has improved detection accuracy. [Solution] A pressure sensor 10 has a membrane 22 in which deformation corresponding to pressure occurs, a first gauge layer 40 which is formed on the membrane 22, an intermediate insulation layer 50 which is formed on the first gauge layer 40, and a second gauge layer 60 which is formed on the intermediate insulation layer 50. The first gauge layer 40 and the second gauge layer 60 respectively include a first detection part 42 and a second detection part 62 which detect the deformation of the membrane. The distance from the surface of the membrane 22 to the second detection part 62 is no more than 30 μm.

公开(公告)号：US20200037899A1

公开(公告)日：2020-02-06

申请号：US16498685

申请日：2018-03-06

Applicant: TDK Corporation

Inventor： Mutsuko NAKANO ,  Ken UNNO ,  Tomohiro MORIKI

IPC: A61B5/022 ,  G01L9/06

Abstract: A fluid pressure detection device capable of accurately detecting a pressure change of a fluid flowing inside a tube includes a substrate, a piezoelectric element formed on the top surface of the substrate, a support body which is annular and surrounds the piezoelectric element and supports the top surface of the substrate, and a lid body which is provided to close the top opening of the support body, and deforms the tube with the bottom surface of the substrate by pressing the substrate through the support body.

公开(公告)号：US20240302226A1

公开(公告)日：2024-09-12

申请号：US18599247

申请日：2024-03-08

Applicant: TDK Corporation

Inventor： Tetsuya SASAHARA ,  Ken UNNO ,  Masanori KOBAYASHI ,  Tetsuo HATA ,  Lucie OUEDRAOGO

IPC: G01L1/22 ,  G01L1/16

CPC classification number: G01L1/2262 ,  G01L1/16 ,  G01L1/2281

Abstract: A strain measuring system includes a piezoelectric element and a resistor provided on an object. The system also includes a resistance detection circuit to detect a change in resistance of the resistor, and a piezoelectric effect detection circuit to detect a piezoelectric effect of the piezoelectric element. A strain calculation circuit detects a strain changing time while the strain of the object is changing using a detection result from the piezoelectric effect detection circuit, calculates a change in resistance of the resistor during the strain changing time, and calculates a degree of strain of the object using a calculation result of the change in resistance.