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公开(公告)号:US10347816B2
公开(公告)日:2019-07-09
申请号:US15420798
申请日:2017-01-31
Applicant: TDK CORPORATION
Inventor: Toshiki Maruyama , Takuto Horii , Ryuichi Sakai , Shunsuke Ueno , Atsushi Ezawa , Tatsuya Taki
IPC: H01L41/083 , H01L41/09 , H01L41/04 , H01L41/047
Abstract: The present invention relates to a piezoelectric driving device 10 capable of moving the movable member 14 along the axis direction engaged in a movable manner to the axial direction with respect to the shaft 16. A pair of the external electrodes 26 and 27 respectively comprises the first external connection part 26a and the second external connection part 27a formed at the lower end face in Z axis direction by being insulated against each other. At the opposing face of the weight member 30 facing against the lower end face of the element 20, the first circuit pattern 36 and the second circuit pattern 37 are formed by being insulated against each other; and the first circuit pattern 36 and the second circuit pattern 37 are respectively connected to the first external connection part 26 and the second external connection part 27 by a metal bonding.