公开(公告)号：US3881125A

公开(公告)日：1975-04-29

申请号：US44171874

申请日：1974-02-11

Applicant: TEKTRONIX INC

Inventor： BAKER THOMPSON A ,  BALSIGER MELVIN M ,  CONSIDINE KEVIN T ,  LITSJO HERBERT E

IPC: H01J37/073 ,  H01J37/09 ,  H01J1/92 ,  H01J37/18

CPC classification number: H01J37/073 ,  H01J37/09 ,  H01J2237/06316

Abstract: An electron-beam tube for a scanning electron microscope employs the use of a TF built-up field emission cathode which can be operated from preferably the 100 plane in a substantially continuous mode to provide a stable electron beam having high current density, high resolution, and very high electron optical brightness from a source of very small proportions. The tube, which comprises an evacuated envelope having chambers of different vacuums, is designed to facilitate either quickchange cathode replacement or attendance to the specimen with minimum loss of operating time since the vacuum of the entire tube need not be released. Also, the chamber containing the field emission cathode can be separable from the tube to allow replacement by a new preprocessed cathode in a pre-evacuated chamber. In this case, the mounting means includes a device for puncturing a seal in the cathode chamber to allow the electron beam to pass therethrough.

Abstract translation: 用于扫描电子显微镜的电子束管采用使用TF组合场致发射阴极，其能够以基本上连续的模式从优选的100平面操作，以提供具有高电流密度，高分辨率的稳定电子束， 和非常高的电子光学亮度来自非常小比例的来源。 包括具有不同真空腔室的真空外壳的管被设计成便于快速更换阴极更换或者以最小的操作时间损失从而使试样出现，因为整个管的真空不需要被释放。 此外，包含场发射阴极的室可以与管分离，以允许在预抽真空室中由新的预处理阴极替换。 在这种情况下，安装装置包括用于刺穿阴极室中的密封以允许电子束通过的装置。