公开(公告)号：US20170358729A1

公开(公告)日：2017-12-14

申请号：US15538632

申请日：2015-12-23

Applicant: THALES

Inventor： Afshin ZIAEI ,  Matthieu LE BAILLIF ,  Paolo MARTINS ,  Shailendra BANSROPUN

IPC: H01L41/08 ,  H01H59/00 ,  B81B3/00 ,  H01G5/18 ,  H01G5/16 ,  H01H57/00 ,  H01L41/09

CPC classification number: H01L41/08 ,  B81B3/0021 ,  B81B7/0019 ,  B81B2201/018 ,  H01G5/16 ,  H01G5/18 ,  H01H57/00 ,  H01H59/0009 ,  H01H2057/006 ,  H01L41/0933

Abstract: According to one aspect of the invention, there is proposed a capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS comprising a metallic membrane suspended above an RF transmission line and resting on ground planes, and exhibiting a lower face, an upper face opposite to the lower face and a first layer comprising a refractory metallic material at least partially covering the upper face of the membrane so as to prevent the heating of the membrane.

公开(公告)号：US20220060173A1

公开(公告)日：2022-02-24

申请号：US17418824

申请日：2019-12-27

Applicant: THALES ,  CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE ,  FREC'N'SYS ,  YNCREA HAUTS-DE-FRANCE ETABLISSEMENT ISEN LILLE ,  UNIVERSITE DE LILLE ,  ECOLE CENTRALE DE LILLE ,  UNIVERSITE POLYTECHNIQUE HAUTS-DE-FRANCE

Inventor： Thi Mai PHAM COLOMBAN ,  Claude PRÉVOT ,  Paolo MARTINS ,  Anne-Christine HLADKY- HENNION ,  Bertrand DUBUS ,  Marianne SAGNARD ,  Thierry LAROCHE ,  Sylvain BALLANDRAS ,  Charles CROENNE

IPC: H03H9/145 ,  H03H9/02 ,  H03H9/64

Abstract: A surface acoustic wave device: includes at least one transducer; two acoustic reflectors disposed on either side of the at least one transducer so as to form a cavity, each acoustic reflector comprising an array of electrodes in the form of lines parallel with each other, each array comprising a subset of electrodes connected to a reference potential denoted mass defining a first connection type, and a subset of electrodes that are not connected to any potential, i.e. that have a floating connection defining a second connection type; at least one switching circuit configured to modify the distribution of the connections of at least one part of the electrodes of each array between the different connection types.