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公开(公告)号:US10197884B2
公开(公告)日:2019-02-05
申请号:US15649455
申请日:2017-07-13
Applicant: The Regents of the University of California
Inventor: Nadir Dagli
IPC: G02F1/225 , G02B6/42 , G02B6/125 , G02F1/01 , G02F1/017 , G02F1/025 , G02B6/132 , G02B6/12 , G02F1/21
Abstract: Electro-optical modulators and methods of fabrication are disclosed. An electro-optical modulator includes a Mach-Zehnder interferometer containing an intrinsic silicon layer semiconductor layer and a coplanar waveguide. Signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers.
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公开(公告)号:US09733543B2
公开(公告)日:2017-08-15
申请号:US15286275
申请日:2016-10-05
Applicant: The Regents of the University of California
Inventor: Nadir Dagli
IPC: G02F1/225 , G02F1/017 , G02B6/132 , G02B6/125 , G02F1/03 , G02B6/42 , G02F1/01 , G02F1/025 , G02B6/12 , G02F1/21
CPC classification number: G02F1/2255 , G02B6/125 , G02B6/132 , G02B6/42 , G02B2006/1204 , G02B2006/12047 , G02B2006/12054 , G02B2006/12078 , G02B2006/12128 , G02B2006/12142 , G02B2006/12159 , G02F1/0121 , G02F1/01708 , G02F1/025 , G02F1/2257 , G02F2001/212 , G02F2201/12 , G02F2202/20 , G02F2202/42
Abstract: Electro-optical modulators and methods of fabrication are disclosed. An electro-optical modulator includes a Mach-Zehnder interferometer formed in a substrate removed semiconductor layer and a coplanar waveguide. Signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers.
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公开(公告)号:US20170307954A1
公开(公告)日:2017-10-26
申请号:US15649455
申请日:2017-07-13
Applicant: The Regents of the University of California
Inventor: Nadir Dagli
IPC: G02F1/225 , G02B6/42 , G02B6/125 , G02F1/01 , G02F1/017 , G02F1/025 , G02B6/132 , G02B6/12 , G02F1/21
CPC classification number: G02F1/2255 , G02B6/125 , G02B6/132 , G02B6/42 , G02B2006/1204 , G02B2006/12047 , G02B2006/12054 , G02B2006/12078 , G02B2006/12128 , G02B2006/12142 , G02B2006/12159 , G02F1/0121 , G02F1/01708 , G02F1/025 , G02F1/2257 , G02F2001/212 , G02F2201/12 , G02F2202/20 , G02F2202/42
Abstract: Electro-optical modulators and methods of fabrication are disclosed. An electro-optical modulator includes a Mach-Zehnder interferometer containing an intrinsic silicon layer semiconductor layer and a coplanar waveguide. Signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers.
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4.
公开(公告)号:US20170023842A1
公开(公告)日:2017-01-26
申请号:US15286275
申请日:2016-10-05
Applicant: The Regents of the University of California
Inventor: Nadir Dagli
CPC classification number: G02F1/2255 , G02B6/125 , G02B6/132 , G02B6/42 , G02B2006/1204 , G02B2006/12047 , G02B2006/12054 , G02B2006/12078 , G02B2006/12128 , G02B2006/12142 , G02B2006/12159 , G02F1/0121 , G02F1/01708 , G02F1/025 , G02F1/2257 , G02F2001/212 , G02F2201/12 , G02F2202/20 , G02F2202/42
Abstract: Electro-optical modulators and methods of fabrication are disclosed. An electro-optical modulator includes a Mach-Zehnder interferometer formed in a substrate removed semiconductor layer and a coplanar waveguide. Signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers.
Abstract translation: 公开了电光调制器和制造方法。 电光调制器包括形成在去除衬底的半导体层和共面波导中的马赫 - 曾德干涉仪。 来自共面波导的信号通过第一和第二电介质层电容耦合到马赫 - 曾德干涉仪。
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5.
公开(公告)号:US09470952B2
公开(公告)日:2016-10-18
申请号:US14891934
申请日:2014-06-12
Applicant: The Regents of the University of California
Inventor: Nadir Dagli
CPC classification number: G02F1/2255 , G02B6/125 , G02B6/132 , G02B6/42 , G02B2006/1204 , G02B2006/12047 , G02B2006/12054 , G02B2006/12078 , G02B2006/12128 , G02B2006/12142 , G02B2006/12159 , G02F1/0121 , G02F1/01708 , G02F1/025 , G02F1/2257 , G02F2001/212 , G02F2201/12 , G02F2202/20 , G02F2202/42
Abstract: Electro-optical modulators and methods of fabrication are disclosed. An electro-optical modulator includes a Mach-Zehnder interferometer formed in a substrate removed semiconductor layer and a coplanar waveguide. Signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers having strong dielectric constant dispersion.
Abstract translation: 公开了电光调制器和制造方法。 电光调制器包括形成在去除衬底的半导体层和共面波导中的马赫 - 曾德干涉仪。 来自共面波导的信号通过具有强介电常数色散的第一和第二介电层电容耦合到马赫 - 曾德干涉仪。
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6.
公开(公告)号:US20160139486A1
公开(公告)日:2016-05-19
申请号:US14891934
申请日:2014-06-12
Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Inventor: Nadir Dagli
CPC classification number: G02F1/2255 , G02B6/125 , G02B6/132 , G02B6/42 , G02B2006/1204 , G02B2006/12047 , G02B2006/12054 , G02B2006/12078 , G02B2006/12128 , G02B2006/12142 , G02B2006/12159 , G02F1/0121 , G02F1/01708 , G02F1/025 , G02F1/2257 , G02F2001/212 , G02F2201/12 , G02F2202/20 , G02F2202/42
Abstract: Electro-optical modulators and methods of fabrication are disclosed. An electro-optical modulator includes a Mach-Zehnder interferometer formed in a substrate removed semiconductor layer and a coplanar waveguide. Signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers having strong dielectric constant dispersion.
Abstract translation: 公开了电光调制器和制造方法。 电光调制器包括形成在去除衬底的半导体层和共面波导中的马赫 - 曾德干涉仪。 来自共面波导的信号通过具有强介电常数色散的第一和第二介电层电容耦合到马赫 - 曾德干涉仪。
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