公开(公告)号：US20240044807A1

公开(公告)日：2024-02-08

申请号：US18356096

申请日：2023-07-20

Applicant: TOKYO ELECTRON LIMITED

Inventor： Tomoya ENDO ,  Kentaro Konishi ,  Yuki Ishida ,  Jun Fujihara

IPC: G01N21/95 ,  H01L21/66 ,  G01N21/13

CPC classification number: G01N21/9501 ,  H01L22/12 ,  G01N21/13 ,  G01N2201/0461 ,  G01N2201/025 ,  G01N2201/0227 ,  G01N2021/0112

Abstract: There is an inspection system including multiple inspection units configured to inspect substrates, wherein each of the inspection units includes: a tester configured to inspect a substrate; a moving part configured to hold and move the substrate relative to the tester; and a frame structure configured to accommodate the tester and the moving part, wherein the frame structure of one inspection unit includes: a first frame to be connected to a frame structure of another inspection unit; and a second frame that accommodates at least the moving part and is configured to move relative to the first frame to extract the moving part from the first frame.