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公开(公告)号：US20210061651A1
公开(公告)日：2021-03-04
申请号：US17095372
申请日：2020-11-11
Applicant: TOPPAN PRINTING CO., LTD.
Inventor： Yasuko GOTOH , Hiroyuki CHIKAMORI , Naohiro NOMURA , Naoki INAGAKI
Abstract: A MEMS microphone includes: a glass substrate including an opening portion; a membrane provided on the glass substrate so as to cover the opening portion and including a first conductive layer; and a backplate provided above the membrane via a cavity, including a plurality of through holes through which sound waves pass, and including a second conductive layer. The first conductive layer is made of a metal or a conductive oxide. The second conductive layer is made of a metal or a conductive oxide.
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