公开(公告)号：US20180065162A1

公开(公告)日：2018-03-08

申请号：US15786446

申请日：2017-10-17

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Naoko MIKAMI ,  Sumika TAMURA ,  Reiji TERADA ,  Masashi KURATA ,  Daisei FUJITO ,  Kiyoaki NISHITSUJI ,  Takehiro NISHI

IPC: B21B3/02 ,  B21B1/22 ,  C23C14/04 ,  C23C16/04 ,  C23F1/28 ,  C23F1/40 ,  B32B15/01 ,  B32B15/04 ,  H01L51/00

CPC classification number: B21B3/02 ,  B21B1/227 ,  B21B2261/04 ,  B32B15/015 ,  B32B15/04 ,  C23C14/042 ,  C23C16/042 ,  C23F1/28 ,  C23F1/40 ,  H01L51/0015

Abstract: A rolled metal sheet includes an obverse surface and a reverse surface that is a surface located opposite to the obverse surface. At least either one of the obverse surface and the reverse surface is a processing object. A method for manufacturing a metal mask substrate includes reducing a thickness of the rolled metal sheet to 10 μm or less by etching the processing object by 3 μm or more by use of an acidic etching liquid, and roughening the processing object so that the processing object becomes a resist formation surface that has a surface roughness Rz of 0.2 μm or more, thereby obtaining a metal mask sheet.

公开(公告)号：US20180312979A1

公开(公告)日：2018-11-01

申请号：US16025857

申请日：2018-07-02

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Mikio SHINNO ,  Reiji TERADA ,  Kiyoaki NISHITSUJI ,  Masashi KURATA ,  Kenta TAKEDA ,  Naoko MIKAMI ,  Sumika AKIYAMA

IPC: C23F1/02 ,  C23F1/16 ,  B21B1/38

Abstract: The ratio of the difference between a surface distance L at each of the different positions in a width direction DW of a metal sheet and a minimum surface distance Lm to the minimum surface distance Lm is an elongation difference ratio. The elongation difference ratio in a center section in the width direction DW of the metal sheet is less than or equal to 3×10−5. The elongation difference ratios in two edge sections in the width direction DW of the metal sheet are less than or equal to 15×10−5. The elongation difference ratio in at least one of the two edge sections in the width direction DW of the metal sheet is less than the elongation difference ratio in the center section in the width direction of the metal sheet.

公开(公告)号：US20210355586A1

公开(公告)日：2021-11-18

申请号：US17390579

申请日：2021-07-30

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Naoko MIKAMI ,  Sumika TAMURA ,  Reiji TERADA ,  Masashi KURATA ,  Daisei FUJITO ,  Kiyoaki NISHITSUJI ,  Takehiro NISHI

IPC: C23F1/28 ,  B21B1/22 ,  B21B3/02 ,  B32B15/01 ,  B32B15/04 ,  C23C14/04 ,  C23C14/34 ,  C23C16/04 ,  C23F1/16 ,  C23F1/40 ,  H01L51/00 ,  C23C14/24

Abstract: A rolled metal sheet includes an obverse surface and a reverse surface that is a surface located opposite to the obverse surface. At least either one of the obverse surface and the reverse surface is a processing object. A method for manufacturing a metal mask substrate includes reducing a thickness of the rolled metal sheet to 10 μm or less by etching the processing object by 3 μm or more by use of an acidic etching liquid, and roughening the processing object so that the processing object becomes a resist formation surface that has a surface roughness Rz of 0.2 μm or more, thereby obtaining a metal mask sheet.

公开(公告)号：US20190078194A1

公开(公告)日：2019-03-14

申请号：US16019277

申请日：2018-06-26

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Mikio SHINNO ,  Reiji TERADA ,  Kiyoaki NISHITSUJI

IPC: C23C14/04 ,  H01L51/00 ,  C23F1/02

Abstract: The percentage of a height of each undulation with respect to a length of the undulation is a unit steepness. A steepness is an average value of unit steepnesses of all undulations in a longitudinal direction at each of different positions in a width direction or a metal sheet. The maximum value of steepnesses in a center section in the width direction is less than or equal to 0.3%. The maximum value of steepnesses in a first edge in the width direction and a maximum value of steepnesses in a second edge section in the width direction are less than or equal to 0.6%. The maximum value of steepnesses in at least one of the first edge section and the second edge section in the width direction is less than the maximum value of steepnesses in the center section in the width direction.